Mass spectrometry of diffuse coplanar surface barrier discharge: influence of discharge frequency and oxygen content in N2/O2 mixture*
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Diffuse Coplanar Surface Barrier Discharge (DCSBD) has been studied extensively for industrial applications in recent decade. So far, limited information was available on the production of ozone or nitrogen oxides important for industrial deployment of DCSBD. In this paper results of mass spectrometry of DCSBD performed at atmospheric pressure are presented. DCSBD mass spectra were studied for different oxygen contents in N2/O2 working gas mixture at low flow rate (estimated residence time in discharge chamber was approx. 3 s). Influence of the driving frequency (15, 30 and 50 kHz) at constant high voltage amplitude was studied as well. Ozone and NO production in DCSBD are given as typical representatives. Production of ozone decreases with the driving frequency, which could be attributed to the gas heating at higher frequencies.