Quantum lithography on bound-free transitions

Regular Article

Abstract

A new protocol for quantum lithography is presented. A formula which describes the single-quantum bound-free transition to the center of the continuous spectral zone under the action of two monochromatic photon beams is obtained. The derivation is based on the Markov approximation and takes into account all orders of the interaction parameter. The probabilities of bound-free transition for several initial field states are represented: N-photon, entangled N-photon and coherent states cases. The possibility of obtaining thin geometric structures on the surface of photoresist is discussed.

Keywords

Quantum Optics 

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Copyright information

© EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg 2013

Authors and Affiliations

  1. 1.Saint-Petersburg National Research University of Information Technologies, Mechanics and OpticsSaint PetersburgRussia

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