Multi-discharge phenomenon in coplanar electrodes microplasma devices

Abstract.

The idea of a multi-discharge phenomenon in coplanar electrodes microplasma devices (CEMPD) is introduced and investigated. The current-voltage characteristics of CEMPD under different neon pressures were measured and two-dimensional discharge characteristics of CEMPD are simulated based on the particle-in-cell/Monte Carlo model to investigate the details of the multi-discharge. For all simulations, the width and depth of the microcavity are 100 μm and 50 μm respectively, the gap between the two electrodes is 10 μm and the voltage between the two electrodes is 200 V. The experimental results show that within the range of neon pressure from 35 kPa to 100 kPa the multi-discharge occurs. The simulation results show that after the first discharge, the center of the electron density is concentrated on one side around the gap. The electronic space charge center can be seen as a virtual anode. The potential difference between the virtual anode and the other side is high enough to cause the second discharge. During the second discharge, the center of the electron density transfers from the top side to the bottom side and the second discharge occurs. The simulation results at neon pressure 65.8 kPa and 100 kPa confirm the multi-discharge phenomenon.