Abstract
Determinations of radical density are essential to investigate the physical-chemical processes in plasmas and setup the related theoretical models. This paper presents the experimental measurement of atomic hydrogen near grounded electrode in dielectric barrier discharge medium-pressure hydrogen plasma via threshold ionisation-molecular beam mass spectrometry. After investigating the possible influences from parent molecules in excited states, background component and space-charge, evolution of atomic hydrogen density as functions of discharge parameters are investigated utilising the signal of H2 molecule beam as the reference. At fixed gas pressure of 6.0 torr and a discharge voltage of 24 kV, atomic hydrogen density increases monotonously from 1.1×1014 to 2.0×1015 cm-3 as the discharge frequency increases from 9 to 26 kHz. Similarly the rising discharge voltage also lead to enhancement of atomic hydrogen density.
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Wang, W., Xu, Y., Dong, C. et al. Measurement of atomic hydrogen density in non-thermal H2 plasmas via threshold ionisation-molecular beam mass spectrometry. Eur. Phys. J. D 50, 257–264 (2008). https://doi.org/10.1140/epjd/e2008-00232-x
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DOI: https://doi.org/10.1140/epjd/e2008-00232-x