Argon cluster impacts on layered silicon, silica, and graphite surfaces

Abstract.

Seven structures of covalently bonded materials are used as targets of 6 keV Ar12 cluster bombardment in classical molecular dynamics simulations. Energy deposition, cratering and Ar ranges are compared and remarkable differences are found between the structures. In particular, bombardment of a thin 2 nm silica layer on top of the Si(111) surface is shown to behave quite differently from bombardment of pure Si.

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Correspondence to J. Samela.

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Samela, J., Nordlund, K., Keinonen, J. et al. Argon cluster impacts on layered silicon, silica, and graphite surfaces. Eur. Phys. J. D 43, 181–184 (2007). https://doi.org/10.1140/epjd/e2007-00104-y

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PACS.

  • 79.20.Ap Theory of impact phenomena; numerical simulation
  • 61.46.Bc Clusters