Abstract.
The results of a systematic study of surface defect formation after energetic Arn+ (n = 12, 22, 32, 54) and Xen+ (n = 4, 16) cluster ion implantation into silicon and sapphire are presented. Implantation energies vary from 3 to 18 keV/ion. Two cases of comparative studies are carried out: the same cluster species are implanted into two different substrates, i.e. Arn+ cluster ions into silicon and sapphire and two different cluster species Arn+ and Xen+ are implanted into the same kind of substrate (silicon). Atomic force, scanning electron and transmission electron microscopies (AFM, SEM and TEM) are used to study the implanted samples. The analysis reveals the formation of two types of surface erosion defects: simple and complex (with centrally positioned hillock) craters. It is found that the ratio of simple to complex crater formation as well as the hillock dimensions depend strongly on the cluster species, size and impact energy as well as on the type of substrate material. Qualitative models describing the two comparative cases of cluster implantation, the case of different cluster species and the case of different substrate materials, are proposed.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
I. Yamada, J. Matsuo, N. Toyoda, A. Kirkpatrick, Mater. Sci. Eng. R 34, 231 (2001)
R.E. Palmer, S. Pratontep, H.-G. Boyen, Nat. Mater. 2, 443 (2003)
C. Binns, Surf. Sci. Rep. 44, 1 (2001)
A. Perez, P. Melinon, V. Dupuis, P. Jensen, A. Prevel, J. Tuaillon, L. Bardotti, C. Martet, M. Treilleux, M. Broyer, M. Pellarin, J.L. Vaille, B. Palpant, J. Lerme, J. Phys. D 30, 709 (1997)
Y. Qiang, Y. Thurner, T. Reiners, O. Rattunde, H. Haberland, Surf. Coating Tech. 100-101, 27 (1998)
H.-J. Gao, S.J. Pang, Z.Q. Xue, in Electrical and optical polymer systems, edited by D.L. Wise, G.E. Wnek, B.J. Trantolo, T.H. Cooper, J.D. Gresser (Marcel Dekker, New York, 1998), p. 729
Metal clusters at surfaces, edited by K.-H. Meiwes-Broer (Springer, Berlin, 2000)
K.L. Merkle, W. Jager, Phil. Mag. A 44, 741 (1981)
F. Seitz, J.S. Koehler, Solid state physics: advances in research and applications, edited by F. Seitz, D. Turnbull (Academic, New York, 1956), Vol. 2
R. Kelly, Radiat. Eff. 32, 91 (1977)
L. Porte, M. Phaner, C.H. de Villeneuve, N. Moncoffre, J. Tousset, Nucl. Instrum. Meth. Phys. Res. B 44, 116 (1989)
Q. Yang, T. Li, B.V. King, R.J. MacDonald, Phys. Rev. B 53, 3032 (1996)
I.C. Gebeshuber, S. Cernusca, F. Aumayr, H.P. Winter, Int. J. Mass Spectrom. 229, 27 (2003)
A. Audouard, R. Mamy, M. Toulemonde, G. Szenes, L. Thome, Europhys. Lett. 40, 527 (1997)
V.A. Skuratov, D.L. Zagorski, A.E. Efimov, V.A. Kluev, Y.P. Toporov, B.V. Mchedlishvili, Radiat. Meas. 34, 571 (2001)
C. Müller, M. Cranney, A. El-Said, N. Ishikawa, A. Iwase, M. Lang, R. Neumann, Nucl. Instrum. Meth. Phys. Res. B 191, 246 (2002)
G. Szenes, Nucl. Instrum. Meth. Phys. Res. B 191, 27 (2002)
L.P. Allen, Z. Insepov, D.B. Fenner, C. Santeufemio, W. Brooks, K.S. Jones, I. Yamada, J. Appl. Phys. 92, 3671 (2002)
D. Takeuchi, T. Seki, A. Takaaki, J. Matsuo, I. Yamada, Mat. Chem. Phys. 54, 76 (1998)
T.J. Colla, R. Aderjan, R. Kissel, H.M. Urbassek, Phys. Rev. B 62, 8487 (2000)
Y. Yamaguchi, J. Gspann, Phys. Rev. B 66, 155408 (2002)
M. Moseler, O. Rattunde, J. Nordiek, H. Haberland, Nucl. Instrum. Meth. Phys. Res. B 164-165, 522 (2000)
Z. Insepov, R. Manory, J. Matsuo, I. Yamada, Nucl. Instrum. Meth. Phys. Res. B 148, 47 (1999)
Y. Yamamura, Nucl. Instrum. Meth. Phys. Res. B 33, 493 (1988)
V.I. Shulga, M. Vicanek, P. Sigmund, Phys. Rev. A 39, 3360 (1989)
S. Pratontep, P. Preece, C. Xirouchaki, R.E. Palmer, C.F. Sanz-Navarro, S.D. Kenny, R. Smith, Phys. Rev. Lett. 90, 055503 (2003)
L. Seminara, P. Convers, R. Monot, W. Harbich, Eur. Phys. J. D 29, 49 (2004)
J.H. Liang, H.M. Han, Nucl. Instrum. Meth. Phys. Res. B 228, 250 (2005)
N.R. Arista, A. Gras-Marti, J. Phys.: Condens. Matter 3, 7931 (1991)
P. Von Blanckenhagen, A. Gruber, J. Gspann, Nucl. Instr. Meth. Phys. Res. B 122, 322 (1997)
J.-H. Song, S.N. Kwon, D.-K. Choi, W.-K. Choi, Nucl. Instrum. Meth. Phys. Res. B 179, 568 (2001)
M. Döbeli, F. Ames, C.R. Musil, L. Scandella, M. Suter, H.A. Synal, Nucl. Instrum. Meth. Phys. Res. B 143, 503 (1998)
P.A. Thevenard, J.-P. Dupin, B. Vu Thien, S.T. Purcell, V. Semet, Surf. Coating Tech. 128, 59 (2000)
B. Canut, P. Thevenard, C. Jardin, Nucl. Instrum. Meth. Phys. Res. B 218, 487 (2004)
J.C. Girard, A. Michel, C. Tromas, C. Jaouen, S. Della-Negra, Nucl. Instrum. Meth. Phys. Res. B 209, 85 (2003)
V.N. Popok, S.V. Prasalovich, E.E.B. Campbell, Surf. Sci. 566-568, 1179 (2004)
V.N. Popok, S.V. Prasalovich, M. Samuelsson, E.E.B. Campbell, Rev. Sci. Instrum. 73, 4283 (2002)
V.N. Popok, S.V. Prasalovich, E.E.B. Campbell, Nucl. Instrum. Meth. Phys. Res. B 207, 145 (2003)
CrysTec GmbH, www.crystec.de
Crystal GmbH, www.crystal-gmbh.com
CRC Handbook of Chemistry and Physics edited by D.R. Lide, 81st edn. (CRC Press, Cleveland, 2000)
J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985)
D.M. Parkin, C.A. Coulter, J. Nucl. Mater. 101, 261 (1981)
V.N. Popok, S.V. Prasalovich, E.E.B. Campbell, Vacuum 76, 265 (2004)
J. Samela, K. Nordlund, private communications
T. Aoki, J. Matsuo, G. Takaoka, I. Yamada, Nucl. Instrum. Meth. Phys. Res. B 206, 861 (2003)
R. Kramer, Y. Yamaguchi, J. Gspann, Surf. Interface Anal. 36, 148 (2004)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Prasalovich, S., Popok, V., Persson, P. et al. Experimental studies of complex crater formation under cluster implantation of solids. Eur. Phys. J. D 36, 79–88 (2005). https://doi.org/10.1140/epjd/e2005-00197-2
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1140/epjd/e2005-00197-2