Nanophononics: state of the art and perspectives
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Abstract
Understanding and controlling vibrations in condensed matter is emerging as an essential necessity both at fundamental level and for the development of a broad variety of technological applications. Intelligent design of the band structure and transport properties of phonons at the nanoscale and of their interactions with electrons and photons impact the efficiency of nanoelectronic systems and thermoelectric materials, permit the exploration of quantum phenomena with micro- and nanoscale resonators, and provide new tools for spectroscopy and imaging. In this colloquium we assess the state of the art of nanophononics, describing the recent achievements and the open challenges in nanoscale heat transport, coherent phonon generation and exploitation, and in nano- and optomechanics. We also underline the links among the diverse communities involved in the study of nanoscale phonons, pointing out the common goals and opportunities.
Keywords
Mesoscopic and Nanoscale SystemsReferences
- 1.E. Pop, Nano Res. 3, 147 (2010)CrossRefGoogle Scholar
- 2.Z. Yan, G. Liu, J.M. Khan, A.A. Balandin, Nat. Commun. 3, 827 (2012)ADSCrossRefGoogle Scholar
- 3.G.J. Snyder, E.S. Toberer, Nat. Mater. 7, 105 (2008)ADSCrossRefGoogle Scholar
- 4.K. Biswas et al., Nature 489, 414 (2012)ADSCrossRefGoogle Scholar
- 5.M. Aspelmeyer, T.J. Kippenberg, F. Marquardt, Rev. Mod. Phys. 86, 1391 (2014)ADSCrossRefGoogle Scholar
- 6.R.P.G. McNeil et al., Nature 477, 439 (2011)ADSCrossRefGoogle Scholar
- 7.S. Hermelin et al., Nature 477, 435 (2011)ADSCrossRefGoogle Scholar
- 8.C. Rossignol et al., Appl. Phys. Lett. 93, 123901 (2008)ADSCrossRefGoogle Scholar
- 9.N. Zen et al., Nat. Commun. 5, 1 (2014)ADSCrossRefGoogle Scholar
- 10.J.-K. Yu et al., Nat. Nanotechnol. 5, 718 (2010)ADSCrossRefGoogle Scholar
- 11.N. Li et al., Rev. Mod. Phys. 84, 1045 (2012)ADSCrossRefGoogle Scholar
- 12.E.W. Montroll, J. Chem. Phys. 18, 183 (1950)ADSCrossRefGoogle Scholar
- 13.H. Baltes, E. Hilf, Solid State Commun. 12, 369 (1973)ADSCrossRefGoogle Scholar
- 14.D.G. Cahill et al., J. Appl. Phys. 93, 793 (2003)ADSCrossRefGoogle Scholar
- 15.A.I. Hochbaum et al., Nature 451, 163 (2008)ADSCrossRefGoogle Scholar
- 16.R. Chen et al., Phys. Rev. Lett. 101, 105501 (2008)ADSCrossRefGoogle Scholar
- 17.D. Li et al., Appl. Phys. Lett. 83, 2934 (2003)ADSCrossRefGoogle Scholar
- 18.M.P. Zaitlin, L.M. Scherr, A.C. Anderson, Phys. Rev. B 12, 4487 (1975)ADSCrossRefGoogle Scholar
- 19.M. Kazan et al., J. Appl. Phys. 107, 083503 (2010)ADSCrossRefGoogle Scholar
- 20.S. Volz, in Thermal Nanosystems and Nanomaterials, Topics in Appl. Phys. (Springer, Berlin, 2009), Vol. 118Google Scholar
- 21.S. Volz, Micro and Nano Heat Transfer, Topics in Appl. Phys. (Springer, Berlin, 2008), Vol. 107Google Scholar
- 22.M.N. Luckyanova et al., Science 338, 936 (2012)ADSCrossRefGoogle Scholar
- 23.J. Ravichandran et al., Nat. Mater. 13, 168 (2014)ADSCrossRefGoogle Scholar
- 24.I. Savic, D. Donadio, F. Gygi, G. Galli, Appl. Phys. Lett. 102, 073113 (2013)ADSCrossRefGoogle Scholar
- 25.S. Baroni, S. de Gironcoli, A. Dal Corso, P. Giannozzi, Rev. Mod. Phys. 73, 515 (2001)ADSCrossRefGoogle Scholar
- 26.A. Ward, D.A. Broido, D.A. Stewart, G. Deinzer, Phys. Rev. B 80, 125203 (2009)ADSCrossRefGoogle Scholar
- 27.G. Fugallo, M. Lazzeri, L. Paulatto, F. Mauri, Phys. Rev. B 88, 045430 (2013)ADSCrossRefGoogle Scholar
- 28.D.A. Broido et al., Appl. Phys. Lett. 91, 231922 (2007)ADSCrossRefGoogle Scholar
- 29.A. Cepellotti et al., Nat. Commun. 6, 1 (2015)CrossRefGoogle Scholar
- 30.S. Lee, D. Broido, K. Esfarjani, G. Chen, Nat. Commun. 6, 7290 (2015)CrossRefGoogle Scholar
- 31.A.J.C. Ladd, B. Moran, W.G. Hoover, Phys. Rev. B 34, 5058 (1986)ADSCrossRefGoogle Scholar
- 32.S. Volz et al., Phys. Rev. B 54, 340 (1996)ADSCrossRefGoogle Scholar
- 33.J.E. Turney, A.J.H. McGaughey, C.H. Amon, Phys. Rev. B 79, 224305 (2009)ADSCrossRefGoogle Scholar
- 34.O.N. Bedoya-Martinez, J.L. Barrat, D. Rodney, Phys. Rev. B 89, 014303 (2014)ADSCrossRefGoogle Scholar
- 35.R. Landauer, Phil. Mag. 21, 863 (1970)ADSCrossRefGoogle Scholar
- 36.N. Mingo, L. Yang, Phys. Rev. B 68, 245406 (2003)ADSCrossRefGoogle Scholar
- 37.W. Zhang, N. Mingo, T.S. Fisher, J. Heat Transfer 129, 483 (2006)CrossRefGoogle Scholar
- 38.N. Mingo, Phys. Rev. B 74, 125402 (2006)ADSCrossRefGoogle Scholar
- 39.J.-S. Wang, J. Wang, N. Zeng, Phys. Rev. B 74, 033408 (2006)ADSCrossRefGoogle Scholar
- 40.S. Xiong, J. Ma, S. Volz, T. Dumitrica, Small 10, 1756 (2014)CrossRefGoogle Scholar
- 41.L.V. Keldysh, Soviet Phys. J. Exp. Theor. Phys. 20, 1307 (1965)Google Scholar
- 42.D.A. Young, H.J. Maris, Phys. Rev. B 40, 3685 (1989)ADSCrossRefGoogle Scholar
- 43.I. Duchemin, D. Donadio, Phys. Rev. B 84, 115423 (2011)ADSCrossRefGoogle Scholar
- 44.P. Reddy, K. Castelino, A. Majumdar, Appl. Phys. Lett. 87, 211908 (2005)ADSCrossRefGoogle Scholar
- 45.C. Blanc et al., Appl. Phys. Lett. 103, 043109 (2013)ADSCrossRefGoogle Scholar
- 46.D.G. Cahill, Rev. Sci. Instrum. 61, 802 (1990)ADSCrossRefGoogle Scholar
- 47.Y.K. Koh, D.G. Cahill, Phys. Rev. B 76, 075207 (2007)ADSCrossRefGoogle Scholar
- 48.S. Lefèvre, S. Volz, Rev. Sci. Instrum. 76, 033701 (2005)ADSCrossRefGoogle Scholar
- 49.A. Sikora et al., Rev. Sci. Instrum. 83, 054902 (2012)ADSCrossRefGoogle Scholar
- 50.A. Sikora et al., Rev. Sci. Instrum. 84, 029901 (2013)ADSCrossRefGoogle Scholar
- 51.K.T. Regner et al., Nat. Commun. 4, 1640 (2013)CrossRefGoogle Scholar
- 52.J.A. Johnson et al., Phys. Rev. Lett. 110, 025901 (2013)ADSCrossRefGoogle Scholar
- 53.E. Chávez-Ángel et al., Appl. Phys. Lett. Mater. 2, 012113 (2014)Google Scholar
- 54.J. Reparaz et al., Rev. Sci. Instrum. 85, 034901 (2014)ADSCrossRefGoogle Scholar
- 55.A.J. Minnich et al., Phys. Rev. Lett. 107, 095901 (2011)ADSCrossRefGoogle Scholar
- 56.L. Romain, Ph.D. thesis, Institut des Nanosciences de Paris, 2014Google Scholar
- 57.M. Maldovan, Nature 503, 209 (2013)ADSCrossRefGoogle Scholar
- 58.H. Lamb, Proc. R. Soc. London A 93, 114 (1917)ADSCrossRefGoogle Scholar
- 59.S. Bramhavar et al., Phys. Rev. B 83, 014106 (2011)ADSCrossRefGoogle Scholar
- 60.J. Cuffe et al., Nano Lett. 12, 3569 (2012)ADSCrossRefGoogle Scholar
- 61.B. Graczykowski et al., New J. Phys. 16, 073024 (2014)ADSCrossRefGoogle Scholar
- 62.A. Shchepetov et al., Appl. Phys. Lett. 102, 192108 (2013)ADSCrossRefGoogle Scholar
- 63.G. Gopalakrishnan et al., Phys. Rev. Lett. 110, 205503 (2013)ADSCrossRefGoogle Scholar
- 64.L. Maerten, A. Bojahr, M. Bargheer, Ultrasonics 56, 148 (2015)CrossRefGoogle Scholar
- 65.Z. Liu et al., Science 289, 1734 (2000)ADSCrossRefGoogle Scholar
- 66.B. Graczykowski et al., Phys. Rev B 91, 075414 (2015)ADSCrossRefGoogle Scholar
- 67.B.L. Davis and M.I. Hussein, Phys. Rev. Lett. 112, 055505 (2014)ADSCrossRefGoogle Scholar
- 68.Y. He et al., ACS Nano 5, 1839 (2011)CrossRefGoogle Scholar
- 69.I. Maasilta and A.J. Minnich, Phys. Today 67, 27 (2014)CrossRefGoogle Scholar
- 70.S. Neogi et al., ACS Nano 9, 3820 (2015)CrossRefGoogle Scholar
- 71.M.S. Dresselhaus et al., Adv. Mater. 19, 1043 (2007)CrossRefGoogle Scholar
- 72.H. Xu et al., Phys. Rev. Lett. 112, 054301 (2014)ADSCrossRefGoogle Scholar
- 73.T. Han et al., Phys. Rev. Lett. 112, 054302 (2014)ADSCrossRefGoogle Scholar
- 74.M.R. Wagner et al., arXiv:1511.07398 (2015)
- 75.D. Schneider et al., Nano Lett. 12, 3101 (2012)ADSCrossRefGoogle Scholar
- 76.E. Alonso-Redondo et al., Nat. Commun. 6, 8309 (2015)CrossRefGoogle Scholar
- 77.V.M. García-Chocano, J. Christensen, J. Sánchez-Dehesa, Phys. Rev. Lett. 112, 144301 (2014)ADSCrossRefGoogle Scholar
- 78.M.S. Kushwaha, P. Halevi, L. Dobrzynski, B. Djafari-Rouhani, Phys. Rev. Lett. 71, 2022 (1993)ADSCrossRefGoogle Scholar
- 79.P.A. Deymier, Acoustic Metamaterials and Phononic Crystals (Springer, Berlin, 2013)Google Scholar
- 80.D. Polder, M. Van Hove, Phys. Rev. B 4, 3303 (1971)ADSCrossRefGoogle Scholar
- 81.K. Joulain et al., Surf. Sci. Rep. 57, 59 (2005)ADSCrossRefGoogle Scholar
- 82.A. Narayanaswamy, S. Shen, G. Chen, Phys. Rev. B 78, 115303 (2008)ADSCrossRefGoogle Scholar
- 83.S. Shen, A. Narayanaswamy, G. Chen, Nano Lett. 9, 2909 (2009)ADSCrossRefGoogle Scholar
- 84.E. Rousseau et al., Nat. Photon. 3, 514 (2009)ADSCrossRefGoogle Scholar
- 85.M. Francoeur, Nature Nano 10, 206 (2015)ADSCrossRefGoogle Scholar
- 86.M. Prunnila, J. Meltaus, Phys. Rev. Lett. 105, 125501 (2010)ADSCrossRefGoogle Scholar
- 87.G. Domingues, S. Volz, K. Joulain, J.-J. Greffet, Phys. Rev. Lett. 94, 085901 (2005)ADSCrossRefGoogle Scholar
- 88.S. Xiong et al., Phys. Rev. Lett. 112, 114301 (2014)ADSCrossRefGoogle Scholar
- 89.V. Chiloyan, J. Garg, K. Esfarjani, G. Chen, Nat. Commun. 6, 6755 (2015)ADSCrossRefGoogle Scholar
- 90.I. Altfeder, A.A. Voevodin, A.K. Roy, Phys. Rev. Lett. 105, 166101 (2010)ADSCrossRefGoogle Scholar
- 91.K. Kloppstech et al., arXiv:1510.06311 (2015)
- 92.J. Schoenwald, E. Burstein, J. Elson, Solid State Commun. 12, 185 (1973)ADSCrossRefGoogle Scholar
- 93.E. Burstein, W.P. Chen, Y.J. Chen, A. Hartstein, J. Vacuum Sci. Technol. 11, 1004 (1974)ADSCrossRefGoogle Scholar
- 94.D. Tilley, Opt. Acta: Int. J. Opt. 30, 1501 (1983)ADSCrossRefGoogle Scholar
- 95.D.L. Mills, Phys. Rev. B 12, 4036 (1975)ADSCrossRefGoogle Scholar
- 96.T. Kume, T. Kitagawa, S. Hayashi, K. Yamamoto, Surf. Sci. 395, 23 (1998)ADSCrossRefGoogle Scholar
- 97.J.-P. Mulet, K. Joulain, R. Carminati, J.-J. Greffet, Appl. Phys. Lett. 78, 2931 (2001)ADSCrossRefGoogle Scholar
- 98.D.-Z.A. Chen, A. Narayanaswamy, G. Chen, Phys. Rev. B 72, 155435 (2005)ADSCrossRefGoogle Scholar
- 99.D.-Z.A. Chen, G. Chen, Appl. Phys. Lett. 91, 121906 (2007)ADSCrossRefGoogle Scholar
- 100.D.-Z.A. Chen, G. Chen, Frontiers in Heat and Mass Transfer 1, 023005 (2010)Google Scholar
- 101.G. Chen, Nanoscale Energy Transport and Conversion: A Parallel Treatment of Electrons, Molecules, Phonons, and Photons (Oxford University Press, Oxford, New York, 2005)Google Scholar
- 102.K. Fuchs, Math. Proc. Cambridge Philos. Soc. 34, 100 (1938)ADSCrossRefGoogle Scholar
- 103.H. Khosravi, D.R. Tilley, R. Loudon, J. Opt. Soc. Am. A 8, 112 (1991)ADSCrossRefGoogle Scholar
- 104.D.Z.A. Chen, A. Narayanaswamy, G. Chen, Proc. ASME Heat Transfer Division 376-2, 841 (2005)Google Scholar
- 105.R. Carminati, J.-J. Greffet, Phys. Rev. Lett. 82, 1660 (1999)ADSCrossRefGoogle Scholar
- 106.A. Narayanaswamy, G. Chen, Appl. Phys. Lett. 82, 3544 (2003)ADSCrossRefGoogle Scholar
- 107.J. Le Gall, M. Olivier, J.-J. Greffet, Phys. Rev. B 55, 10105 (1997)ADSCrossRefGoogle Scholar
- 108.C.A. Pfeiffer, E.N. Economou, K.L. Ngai, Phys. Rev. B 10, 3038 (1974)ADSCrossRefGoogle Scholar
- 109.P.-O. Chapuis, M. Laroche, S. Volz, J.-J. Greffet, Appl. Phys. Lett. 92, 201906 (2008)ADSCrossRefGoogle Scholar
- 110.J. Ordonez-Miranda et al., J. Appl. Phys. 115, 054311 (2014)ADSCrossRefGoogle Scholar
- 111.C. Thomsen, H.T. Grahn, H.J. Maris, J. Tauc, Phys. Rev. B 34, 4129 (1986)ADSCrossRefGoogle Scholar
- 112.V.E. Gusev, A.A. Karabutov, Laser Optoacoustics (AIP Press, New York, 1993)Google Scholar
- 113.A. Bartels et al., Rev. Sci. Instrum. 78, 035107 (2007)ADSCrossRefGoogle Scholar
- 114.P. Emma et al., Nat. Photon. 4, 641 (2010)ADSCrossRefGoogle Scholar
- 115.S. Schäfer, W. Liang, A.H. Zewail, J. Chem. Phys. 135, 214201 (2011)ADSCrossRefGoogle Scholar
- 116.P. Yu, M. Cardona, Fundamentals of Semiconductors (Springer, Heidelberg, 1998)Google Scholar
- 117.H.J. Zeiger et al., Phys. Rev. B 45, 768 (1992)ADSCrossRefGoogle Scholar
- 118.R. Merlin, Solid State Commun. 102, 207 (1997)ADSCrossRefGoogle Scholar
- 119.T. Dekorsy, G. Cho, W. Kutt, H. Kurz, in Light Scattering in Solids VIII, edited by M. Cardona, G. Güntherodt (Springer, Berlin, 2000), Vol. 76Google Scholar
- 120.P. Ruello, V. Gusev, Ultrasonics 56, 21 (2015)CrossRefGoogle Scholar
- 121.M. Perner et al., Phys. Rev. Lett. 85, 792 (2000)ADSCrossRefGoogle Scholar
- 122.V. Gusev, Opt. Commun. 94, 76 (1992)ADSCrossRefGoogle Scholar
- 123.J. Demsar, T. Dekorsy, in Optical Techniques for Solid-State Materials Characterization, edited by R.P. Prasankumar and J.T. Antoinette (CRC Press, Boca Raton, 2012)Google Scholar
- 124.G. Tas, H.J. Maris, Phys. Rev. B 49, 15046 (1994)ADSCrossRefGoogle Scholar
- 125.O.B. Wright, Phys. Rev. B 49, 9985 (1994)ADSCrossRefGoogle Scholar
- 126.O. Wright, V.E. Gusev, IEEE Trans. Ultrasonics, Ferroelectrics, Frequency Control 42, 331 (1995)CrossRefGoogle Scholar
- 127.M. Lejman et al., J. Opt. Soc. Am. B 31, 282 (2014)ADSCrossRefGoogle Scholar
- 128.O. Matsuda et al., Phys. Rev. Lett. 93, 095501 (2004)ADSCrossRefGoogle Scholar
- 129.T. Pezeril et al., Phys. Rev. B 75, 174307 (2007)ADSCrossRefGoogle Scholar
- 130.A. Huynh et al., Phys. Rev. B 78, 233302 (2008)ADSCrossRefGoogle Scholar
- 131.M. Lejman et al., Nat. Commun. 5, 4301 (2014)CrossRefGoogle Scholar
- 132.O.B. Wright, B. Perrin, O. Matsuda, V.E. Gusev, Phys. Rev. B 64, 081202 (2001)ADSCrossRefGoogle Scholar
- 133.P. Babilotte et al., Phys. Rev. B 81, 245207 (2010)ADSCrossRefGoogle Scholar
- 134.E.S.K. Young et al., Phys. Rev. B 86, 155207 (2012)ADSCrossRefGoogle Scholar
- 135.O.B. Wright, V.E. Gusev, Appl. Phys. Lett. 66, 1190 (1995)ADSCrossRefGoogle Scholar
- 136.G.C. Cho, W. Kütt, H. Kurz, Phys. Rev. Lett. 65, 764 (1990)ADSCrossRefGoogle Scholar
- 137.T. Pfeifer, T. Dekorsy, W. Kütt, H. Kurz, Appl. Phys. A 55, 482 (1992)ADSCrossRefGoogle Scholar
- 138.Y.-C. Wen et al., Phys. Rev. B 80, 195201 (2009)ADSCrossRefGoogle Scholar
- 139.P. Babilotte et al., Appl. Phys. Lett. 97, 174103 (2010)ADSCrossRefGoogle Scholar
- 140.A. Bartels, T. Dekorsy, H. Kurz, K. Köhler, Phys. Rev. Lett. 82, 1044 (1999)ADSCrossRefGoogle Scholar
- 141.O. Matsuda et al., Phys. Rev. B 71, 115330 (2005)ADSCrossRefGoogle Scholar
- 142.E. Péronne et al., Appl. Phys. Lett. 102, 043107 (2013)ADSCrossRefGoogle Scholar
- 143.D. Lim et al., Phys. Rev. B 71, 134403 (2005)ADSCrossRefGoogle Scholar
- 144.C. v. Korff Schmising et al., Phys. Rev. B 78, 060404 (2008)ADSCrossRefGoogle Scholar
- 145.H. Wen et al., Phys. Rev. Lett. 110, 037601 (2013)ADSCrossRefGoogle Scholar
- 146.Y. Wang et al., Phys. Rev. B 88, 064307 (2013)ADSCrossRefGoogle Scholar
- 147.K. Norimatsu et al., Solid State Commun. 157, 58 (2013)ADSCrossRefGoogle Scholar
- 148.J. Flock, T. Dekorsy, O.V. Misochko, Appl. Phys. Lett. 105, 011902 (2014)ADSCrossRefGoogle Scholar
- 149.M. Weis et al., Phys. Rev. B 92, 014301 (2015)ADSCrossRefGoogle Scholar
- 150.M.V. Costache et al., Phys. Rev. Lett. 112, 086601 (2014)ADSCrossRefGoogle Scholar
- 151.D. Kim et al., Phys. Rev. Lett. 109, 166801 (2012)ADSCrossRefGoogle Scholar
- 152.A.V. Scherbakov et al., Phys. Rev. Lett. 105, 117204 (2010)ADSCrossRefGoogle Scholar
- 153.J.V. Jäger et al., Appl. Phys. Lett. 103, 032409 (2013)ADSCrossRefGoogle Scholar
- 154.A.J. Kent et al., Phys. Rev. Lett. 96, 215504 (2006)ADSCrossRefGoogle Scholar
- 155.C.L. Poyser, A.V. Akimov, R.P. Campion, A.J. Kent, Sci. Rep. 5, 8279 (2015)ADSCrossRefGoogle Scholar
- 156.A. Fainstein, N.D. Lanzillotti-Kimura, B. Jusserand, B. Perrin, Phys. Rev. Lett. 110, 037403 (2013)ADSCrossRefGoogle Scholar
- 157.I. Mahboob, K. Nishiguchi, A. Fujiwara, H. Yamaguchi, Phys. Rev. Lett. 110, 127202 (2013)ADSCrossRefGoogle Scholar
- 158.V. Gusev, P. Picart, D. Mounier, J.-M. Breteau, Opt. Commun. 204, 229 (2002)ADSCrossRefGoogle Scholar
- 159.Y. Yan, E.B. Gamble, K.A. Nelson, J. Chem. Phys. 83, 5391 (1985)ADSCrossRefGoogle Scholar
- 160.T. Kampfrath, K. Tanaka, K.A. Nelson, Nat. Photon. 7, 680 (2013)ADSCrossRefGoogle Scholar
- 161.R. Mankowsky et al., Phys. Rev. B 91, 094308 (2015)ADSCrossRefGoogle Scholar
- 162.R.J. Stoner et al., AIP Conf. Proc. 550, 468 (2001)ADSCrossRefGoogle Scholar
- 163.G.A. Antonelli, B. Perrin, B.C. Daly, D.G. Cahill, MRS Bull. 31, 607 (2006)CrossRefGoogle Scholar
- 164.J.-F. Robillard, A. Devos, I. Roch-Jeune, P.A. Mante, Phys. Rev. B 78, 064302 (2008)ADSCrossRefGoogle Scholar
- 165.V. Juvé et al., Nano Lett. 10, 1853 (2010)ADSCrossRefGoogle Scholar
- 166.A. Amziane, L. Belliard, F. Decremps, B. Perrin, Phys. Rev. B 83, 014102 (2011)ADSCrossRefGoogle Scholar
- 167.C. Mechri, P. Ruello, V. Gusev, New J. Phys. 14, 023048 (2012)ADSCrossRefGoogle Scholar
- 168.F. Hudert, A. Bartels, T. Dekorsy, K. Khler, J. Appl. Phys. 104, 123509 (2008)ADSCrossRefGoogle Scholar
- 169.A.M. Lomonosov et al., ACS Nano 6, 1410 (2012)CrossRefGoogle Scholar
- 170.C. Mechri et al., Appl. Phys. Lett. 95, 091907 (2009)ADSCrossRefGoogle Scholar
- 171.T. Dehoux, B. Audoin, J. Appl. Phys. 112, 124702 (2012)ADSCrossRefGoogle Scholar
- 172.C. Thomsen, H. Maris, J. Tauc, Thin Solid Films 154, 217 (1987)ADSCrossRefGoogle Scholar
- 173.M. Hettich et al., Appl. Phys. Lett. 98, 261908 (2011)ADSCrossRefGoogle Scholar
- 174.M.D. Losego et al., Nat. Mater. 11, 502 (2012)ADSCrossRefGoogle Scholar
- 175.A. Ayouch et al., ACS Nano 6, 10614 (2012)CrossRefGoogle Scholar
- 176.I. Lisiecki et al., Nano Lett. 13, 4914 (2013)ADSCrossRefGoogle Scholar
- 177.A. Crut, P. Maioli, N. Del Fatti, F. Vallée, Phys. Rep. 549, 1 (2015)ADSMathSciNetCrossRefGoogle Scholar
- 178.F. Hudert et al., Phys. Rev. B 79, 201307 (2009)ADSCrossRefGoogle Scholar
- 179.S. Neogi, D. Donadio, Eur. Phys. J. B 88, 73 (2015)ADSCrossRefGoogle Scholar
- 180.G. Rozas et al., Phys. Rev. Lett. 102, 015502 (2009)ADSCrossRefGoogle Scholar
- 181.G.R.L.D. Landau, Phys. Z. Sowjet. 11, 18 (1937)Google Scholar
- 182.A. Akhieser, J. Phys. USSR 1, 277 (1939)Google Scholar
- 183.E. Chávez-Angel et al., Semicond. Sci. Technol. 29, 124010 (2014)ADSCrossRefGoogle Scholar
- 184.J.M. Ziman, Electrons and Phonons: The Theory of Transport Phenomena in Solids (Oxford University Press, Oxford, 1960)Google Scholar
- 185.A.D. O’Connell et al., Nature 464, 697 (2010)ADSCrossRefGoogle Scholar
- 186.M. Poot, H.S. van der Zant, Phys. Rep. 511, 273 (2012)ADSCrossRefGoogle Scholar
- 187.G. Kurizki et al., Proc. Natl. Acad. Sci. 112, 3866 (2015)ADSCrossRefGoogle Scholar
- 188.A.N. Cleland, Foundations of Nanomechanics (Springer-Verlag, Berlin, Heidelberg, New York, 2003)Google Scholar
- 189.A. Castellanos-Gomez, V. Singh, H.S.J. van der Zant, G.A. Steele, Annalen der Physik 527, 27 (2015)ADSCrossRefGoogle Scholar
- 190.W. Weaver, S.P. Timoshenko, D.H. Young, Vibration Problems in Engineering, 5th edn. (John Wiley & Sons, Weinheim, 1990)Google Scholar
- 191.K.L. Ekinci, M.L. Roukes, Rev. Sci. Instrum. 76, 061101 (2005)ADSCrossRefGoogle Scholar
- 192.K. Ekinci, Small 1, 786 (2005)CrossRefGoogle Scholar
- 193.D.V. Thourhout, J. Roels, Nat. Photon. 4, 211 (2010)ADSCrossRefGoogle Scholar
- 194.M. Imboden, P. Mohanty, Phys. Rep. 534, 89 (2014)ADSMathSciNetCrossRefGoogle Scholar
- 195.R. Lifshitz, M.C. Cross, in Review of Nonlinear Dynamics and Complexity, edited by H.G. Schuster (Wiley, 2008), Vol. 1, p. 1Google Scholar
- 196.Q.P. Unterreithmeier, E.M. Weig, J.P. Kotthaus, Nature 458, 1001 (2009)ADSCrossRefGoogle Scholar
- 197.S.S. Verbridge et al., J. Appl. Phys. 99, 124304 (2006)ADSCrossRefGoogle Scholar
- 198.Q.P. Unterreithmeier, T. Faust, J.P. Kotthaus, Phys. Rev. Lett. 105, 027205 (2010)ADSCrossRefGoogle Scholar
- 199.P.-L. Yu et al., Phys. Rev. Lett. 108, 083603 (2012)ADSCrossRefGoogle Scholar
- 200.P. Ovartchaiyapong et al., Appl. Phys. Lett. 101, 163505 (2012)ADSCrossRefGoogle Scholar
- 201.G.D. Cole et al., Appl. Phys. Lett. 104, 201908 (2014)ADSCrossRefGoogle Scholar
- 202.J. Chan et al., Appl. Phys. Lett. 101, 081115 (2012)ADSCrossRefGoogle Scholar
- 203.P.-L. Yu et al., Appl. Phys. Lett. 104, 023510 (2014)ADSCrossRefGoogle Scholar
- 204.D.T. Nguyen et al., Appl. Phys. Lett. 103, 241112 (2013)ADSCrossRefGoogle Scholar
- 205.T. Faust et al., Phys. Rev. Lett. 109, 037205 (2012)ADSCrossRefGoogle Scholar
- 206.T. Faust et al., Nat. Phys. 9, 485488 (2013)CrossRefGoogle Scholar
- 207.H. Okamoto et al., Nat. Phys. 9, 480 (2013)CrossRefGoogle Scholar
- 208.Y. Zhang et al., Phys. Rev. Lett. 113, 255502 (2014)ADSCrossRefGoogle Scholar
- 209.B.H. Schneider et al., Nat. Commun. 5, 5819 (2014)CrossRefGoogle Scholar
- 210.R.B. Karabalin, M.C. Cross, M.L. Roukes, Phys. Rev. B 79, 165309 (2009)ADSCrossRefGoogle Scholar
- 211.H.J.R. Westra et al., Phys. Rev. Lett. 105, 117205 (2010)ADSCrossRefGoogle Scholar
- 212.I. Mahboob et al., Appl. Phys. Lett. 103, 153105 (2013)ADSCrossRefGoogle Scholar
- 213.M.H. Matheny et al., Nano Lett. 13, 1622 (2013)ADSCrossRefGoogle Scholar
- 214.Q.P. Unterreithmeier, T. Faust, J.P. Kotthaus, Phys. Rev. B 81, 241405 (2010)ADSCrossRefGoogle Scholar
- 215.A. Eichler et al., Nat. Nanotechnol. 6, 339 (2011)ADSCrossRefGoogle Scholar
- 216.R.B. Karabalin et al., Phys. Rev. Lett. 106, 094102 (2011)ADSCrossRefGoogle Scholar
- 217.M.H. Matheny et al., Phys. Rev. Lett. 112, 014101 (2014)ADSCrossRefGoogle Scholar
- 218.C.L. Degen et al., Proc. Natl. Acad. Sci. 106, 1313 (2009)ADSCrossRefGoogle Scholar
- 219.M. Poggio et al., Phys. Rev. Lett. 102, 087604 (2009)ADSCrossRefGoogle Scholar
- 220.J. Moser et al., Nat. Nanotechnol. 8, 493 (2013)ADSCrossRefGoogle Scholar
- 221.J. Chaste et al., Nat. Nanotechnol. 7, 301 (2012)ADSCrossRefGoogle Scholar
- 222.J. Bouchaud, IHS Technology, 2012, https://technology.ihs.com
- 223.J. Arlett, E. Myers, M. Roukes, Nat. Nanotechnol. 6, 203 (2011)ADSCrossRefGoogle Scholar
- 224.K. Eom, H.S. Park, D.S. Yoon, T. Kwon, Phys. Rep. 503, 115 (2011)ADSCrossRefGoogle Scholar
- 225.L.Y. Gorelik et al., Phys. Rev. Lett. 80, 4526 (1998)ADSCrossRefGoogle Scholar
- 226.R.I. Shekhter et al., Nanoelectromech. Syst. 1, 1 (2013)ADSCrossRefGoogle Scholar
- 227.G.A. Steele et al., Science 325, 1103 (2009)ADSCrossRefGoogle Scholar
- 228.I. Yeo et al., Nat. Nanotechnol. 9, 106 (2014)ADSCrossRefGoogle Scholar
- 229.P. Ovartchaiyapong, K.W. Lee, B.A. Myers, A.C.B. Jayich, Nat. Commun. 5, 4429 (2014)ADSCrossRefGoogle Scholar
- 230.A. Barfuss et al., Nat. Phys. 11, 820 (2015)CrossRefGoogle Scholar
- 231.T.J. Kippenberg, K.J. Vahala, Opt. Express 15, 17172 (2007)ADSCrossRefGoogle Scholar
- 232.T.J. Kippenberg, K.J. Vahala, Science 321, 1172 (2008)ADSCrossRefGoogle Scholar
- 233.I. Favero, K. Karrai, Nat. Photon. 3, 201 (2009)ADSCrossRefGoogle Scholar
- 234.Cavity Optomechanics: Nano- and Micromechanical Resonators Interacting with Light, edited by M. Aspelmeyer, T.J. Kippenberg, F. Marquardt (Springer-Verlag, Berlin, Heidelberg, 2014)Google Scholar
- 235.M. Eichenfield et al., Nature 462, 78 (2009)ADSCrossRefGoogle Scholar
- 236.J. Chan et al., Nature 478, 8992 (2011)CrossRefGoogle Scholar
- 237.A.H. Safavi-Naeini et al., Phys. Rev. Lett. 108, 033602 (2012)ADSCrossRefGoogle Scholar
- 238.M. Maldovan, E.L. Thomas, Appl. Phys. Lett. 88, 251907 (2006)ADSCrossRefGoogle Scholar
- 239.J. Gomis-Bresco et al., Nat. Commun. 5, 4452 (2014)CrossRefGoogle Scholar
- 240.A.H. Safavi-Naeini et al., Phys. Rev. Lett. 112, 153603 (2014)ADSCrossRefGoogle Scholar
- 241.G. Heinrich et al., Phys. Rev. Lett. 107, 043603 (2011)ADSCrossRefGoogle Scholar
- 242.V. Peano, C. Brendel, M. Schmidt, F. Marquardt, Phys. Rev. X 5, 031011 (2015)Google Scholar
- 243.O. Romero-Isart et al., Phys. Rev. A 83, 013803 (2011)ADSCrossRefGoogle Scholar
- 244.N. Kiesel et al., Proc. Natl. Acad. Sci. 110, 14180 (2013)ADSCrossRefGoogle Scholar
- 245.P. Mestres et al., Appl. Phys. Lett. 107, 151102 (2015)ADSCrossRefGoogle Scholar
- 246.J. Millen et al., Phys. Rev. Lett. 114, 123602 (2015)ADSCrossRefGoogle Scholar
- 247.J.D. Teufel, J.W. Harlow, C.A. Regal, K.W. Lehnert, Phys. Rev. Lett. 101, 197203 (2008)ADSCrossRefGoogle Scholar
- 248.J.D. Teufel et al., Nature 471, 204208 (2011)CrossRefGoogle Scholar
- 249.F. Lecocq, J.D. Teufel, J. Aumentado, R.W. Simmonds, Nat. Phys. 11, 635639 (2015)CrossRefGoogle Scholar
- 250.V. Singh et al., Nat. Nanotechnol. 9, 820 (2014)ADSCrossRefGoogle Scholar
- 251.T.J. Kippenberg et al., Phys. Rev. Lett. 95, 033901 (2005)ADSCrossRefGoogle Scholar
- 252.C. Metzger et al., Phys. Rev. Lett. 101, 133903 (2008)ADSCrossRefGoogle Scholar
- 253.C.H. Metzger, K. Karrai, Nature 432, 1002 (2004)ADSCrossRefGoogle Scholar
- 254.O. Arcizet et al., Nature 444, 71 (2006)ADSCrossRefGoogle Scholar
- 255.D. Kleckner, D. Bouwmeester, Nature 444, 75 (2006)ADSCrossRefGoogle Scholar
- 256.S. Gigan et al., Nature 444, 67 (2006)ADSCrossRefGoogle Scholar
- 257.A. Schliesser et al., Phys. Rev. Lett. 97, 243905 (2006)ADSCrossRefGoogle Scholar
- 258.F. Marquardt, J.P. Chen, A.A. Clerk, S.M. Girvin, Phys. Rev. Lett. 99, 093902 (2007)ADSCrossRefGoogle Scholar
- 259.I. Wilson-Rae, N. Nooshi, W. Zwerger, T.J. Kippenberg, Phys. Rev. Lett. 99, 093901 (2007)ADSCrossRefGoogle Scholar
- 260.J.D. Teufel et al., Nature 475, 359 (2011)ADSCrossRefGoogle Scholar
- 261.M. Aspelmeyer, S. Gröblacher, K. Hammerer, N. Kiesel, J. Opt. Soc. Am. B 27, A189 (2010)ADSCrossRefGoogle Scholar
- 262.P. Meystre, Annalen der Physik 525, 215 (2013)ADSCrossRefGoogle Scholar
- 263.T.A. Palomaki et al., Science 342, 710 (2013)ADSCrossRefGoogle Scholar
- 264.T.P. Purdy et al., Science 339, 801 (2013)ADSCrossRefGoogle Scholar
- 265.E.E. Wollman et al., Science 349, 952 (2015)ADSMathSciNetCrossRefGoogle Scholar
- 266.S. Weis, R. Riviere, S. Deleglise, E. Gavartin, O. Arcizet, A. Schliesser, T.J. Kippenberg, Science 330, 1520 (2010)ADSCrossRefGoogle Scholar
- 267.J.D. Thompson et al., Nature 452, 72 (2008)ADSCrossRefGoogle Scholar
- 268.J.C. Sankey et al., Nat. Phys. 6, 707 (2010)CrossRefGoogle Scholar
- 269.S. Gröblacher, K. Hammerer, M.R. Vanner, M. Aspelmeyer, Nature 460, 724 (2009)ADSCrossRefGoogle Scholar
- 270.A. Nunnenkamp, K. Börkje, S.M. Girvin, Phys. Rev. Lett. 107, 063602 (2011)ADSCrossRefGoogle Scholar
- 271.D.J. Wilson et al., Nature 524, 325329 (2015)CrossRefGoogle Scholar
- 272.M. Yuan, V. Singh, Y.M. Blanter, G.A. Steele, Nat. Commun. 6, 9491 (2015)Google Scholar
- 273.A. Pilan-Zanoni et al., arXiv:1508.01032 (2015)
- 274.A.G. Krause et al., Nat. Photon. 6, 768 (2012)ADSCrossRefGoogle Scholar
- 275.E. Gil-Santos et al., Nat. Nanotechnol. 10, 810816 (2015)ADSCrossRefGoogle Scholar
- 276.T.A. Palomaki et al., Nature 495, 210214 (2013)CrossRefGoogle Scholar
- 277.J. Bochmann, A. Vainsencher, D.D. Awschalom, A.N. Cleland, Nat. Phys. 9, 712716 (2013)CrossRefGoogle Scholar
- 278.T. Bagci et al., Nature 507, 8185 (2014)CrossRefGoogle Scholar
- 279.C. Campbell, IEEE Proc. 77, 1453 (1989)ADSCrossRefGoogle Scholar
- 280.R. Aigner, in 2003 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers (IEEE, Picataway, 2003), pp. 157–161Google Scholar
- 281.M.J. Hoskins, H. Morko, B.J. Hunsinger, Appl. Phys. Lett. 41, 332 (1982)ADSCrossRefGoogle Scholar
- 282.S. Büyükköse et al., Nanotechnol. 25, 135204 (2014)ADSCrossRefGoogle Scholar
- 283.D.M. Moss et al., Phys. Rev. Lett. 106, 066602 (2011)ADSCrossRefGoogle Scholar
- 284.M.V. Gustafsson et al., Science 346, 207 (2014)ADSCrossRefGoogle Scholar
- 285.A. Sologubenko, T. Lorenz, H. Ott, A. Freimuth, J. Low Temp. Phys. 147, 387 (2007)ADSCrossRefGoogle Scholar
- 286.G.E. Bauer, E. Saitoh, B.J. van Wees, Nat. Mater. 11, 391 (2012)ADSCrossRefGoogle Scholar
- 287.E. Pickwell-MacPherson, V.P. Wallace, Photodiagnosis and Photodynamic Therapy 6, 128 (2009)CrossRefGoogle Scholar
- 288.P. Knobloch et al., Phys. Med. Biol. 47, 3875 (2002)CrossRefGoogle Scholar
- 289.X.-C. Zhang, Phys. Med. Biol. 47, 3667 (2002)CrossRefGoogle Scholar
- 290.Z. Popovic, E. Grossman, IEEE Trans. Terahertz Science and Technology 1, 133 (2011)ADSCrossRefGoogle Scholar
- 291.B.C. Daly et al., Appl. Phys. Lett. 84, 5180 (2004)ADSCrossRefGoogle Scholar
- 292.R. Li Voti, C. Sibilia, M. Bertolotti, Int. J. Thermophys. 26, 1833 (2005)ADSCrossRefGoogle Scholar
- 293.S.M. Nikitin et al., Sci. Rep. 5, 9352 (2015)CrossRefGoogle Scholar
- 294.M. Mohseni, Y. Omar, G.S. Engel, M.B. Plenio, Quantum Effects in Biology (Cambridge University Press, New York, 2014)Google Scholar
- 295.S. Huelga, M. Plenio, Contemp. Phys. 54, 181 (2013)ADSCrossRefGoogle Scholar
- 296.E. Romero et al., Nat. Phys. 10, 676 (2014)CrossRefGoogle Scholar
- 297.F.J. DiSalvo, Science 285, 703 (1999)CrossRefGoogle Scholar
- 298.A. Majumdar, Science 303, 777 (2004)CrossRefGoogle Scholar
- 299.B. Poudel et al., Science 320, 634 (2008)ADSCrossRefGoogle Scholar
- 300.L.-D. Zhao, V.P. Dravid, M.G. Kanatzidis, Energy Environm. Sci. 7, 251 (2014)CrossRefGoogle Scholar
- 301.E. Chávez-Ángel et al., Appl. Phys. Lett. Mater. 2, 012113 (2014)Google Scholar
- 302.J. Cuffe et al., Phys. Rev. Lett. 110, 095503 (2013)ADSCrossRefGoogle Scholar
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