Skip to main content

Pulsed laser diffusion of thin hole-barrier contacts in high purity germanium for gamma radiation detectors

Abstract.

A new method for the formation of hole-barrier contacts in high purity germanium (HPGe) is described, which consists in the sputter deposition of a Sb film on HPGe, followed by Sb diffusion produced through laser annealing of the Ge surface in the melting regime. This process gives rise to a very thin (\( \le 100\) nm) n-doped layer, as determined by SIMS measurement, while preserving the defect-free morphology of HPGe surface. A small prototype of gamma ray detector with a Sb laser-diffused contact was produced and characterized, showing low leakage currents and good spectroscopy data with different gamma ray sources.

This is a preview of subscription content, access via your institution.

References

  1. H.L. Malm, IEEE Trans. Nucl. Sci. 22, 140 (1975)

    Article  ADS  Google Scholar 

  2. J. Eberth, J. Simpson, Prog. Part. Nucl. Phys. 60, 283 (2008)

    Article  ADS  Google Scholar 

  3. G.S. King III, F.T. Avignone III, C.E. Cox, T.W. Hossbach, W. Jennings, J.H. Reeves, Nucl. Instrum. Methods Phys. Res. A 595, 599 (2008)

    Article  ADS  Google Scholar 

  4. G.S. Hubbard, E.E. Hailer, W.L. Hansen, IEEE Trans. Nucl. Sci. 24, 161 (1977)

    Article  ADS  Google Scholar 

  5. E. Bruno, G.G. Scapellato, G. Bisognin, E. Carria, L. Romano, A. Carnera, F. Priolo, J. Appl. Phys. 108, 124902 (2010)

    Article  ADS  Google Scholar 

  6. W.L. Hansen, E.E. Haller, IEEE Trans. Nucl. Sci. 24, 61 (1977)

    Article  ADS  Google Scholar 

  7. P.N. Luke, C.P. Cork, N.W. Madden, C.S. Rossington, M.F. Wesela, IEEE Trans. Nucl. Sci. 39, 590 (1992)

    Article  ADS  Google Scholar 

  8. M. Amman, P.N. Luke, S.E. Boggs, Nucl. Instrum. Methods Phys. Res. A 579, 886 (2007)

    Article  ADS  Google Scholar 

  9. Q. Looker, Fabrication Process Development for High-Purity Germanium Radiation Detectors with Amorphous Semiconductor Contacts, PhD Thesis, University of California, Berkeley (2014)

  10. Q. Looker, M. Amman, K. Vetter, Nucl. Instrum. Methods Phys. Res. A 777, 138 (2015)

    Article  ADS  Google Scholar 

  11. E.L. Hull, R.H. Pehl, J.R. Lathrop, B.E. Suttle, Nucl. Instrum. Methods Phys. Res. A 626-627, 39 (2011)

    Article  ADS  Google Scholar 

  12. T. Nishimura, K. Kita, A. Toriumi, Appl. Phys. Lett. 91, 123123 (2007)

    Article  ADS  Google Scholar 

  13. E. Hull, https://science.energy.gov/~/media/np/pdf/sbir%20sttr/SBIR_STTR_2015/Day%202/Hull_Thin_Window_Presentation_20150807_for_NP_website.pdf

  14. Y. Bao, K. Sun, N. Dhar, M.C. Gupta, IEEE Photon. Technol. Lett. 26, 1422 (2014)

    Article  Google Scholar 

  15. J.M. Poate, J.W. Mayer, Laser Annealing of Semiconductors (Academic Press, New York, 1982)

  16. G. Mannino, V. Privitera, A. La Magna, E. Rimini, E. Napolitani, G. Fortunato, L. Mariucci, Appl. Phys. Lett. 86, 51909 (2005)

    Article  ADS  Google Scholar 

  17. R. Milazzo, E. Napolitani, G. Impellizzeri, G. Fisicaro, S. Boninelli, M. Cuscunà, D. De Salvador, M. Mastromatteo, M. Italia, A. La Magna, G. Fortunato, F. Priolo, V. Privitera, A. Carnera, J. Appl. Phys. 115, 53501 (2014)

    Article  Google Scholar 

  18. G. Impellizzeri, E. Napolitani, S. Boninelli, G. Fisicaro, M. Cuscunà, R. Milazzo, A. La Magna, G. Fortunato, F. Priolo, V. Privitera, J. Appl. Phys. 113, 113505 (2013)

    Article  ADS  Google Scholar 

  19. D.H. Lowndes, T.W. Raudorf, Nucl. Instrum. Methods Phys. Res. A 240, 362 (1985)

    Article  ADS  Google Scholar 

  20. Umicore datasheet of product number 95097, Lot number 12207

  21. G. Maggioni, F. Sgarbossa, E. Napolitani, W. Raniero, V. Boldrini, S.M. Carturan, D.R. Napoli, D. De Salvador, Mater. Sci. Semicond. Process. 75, 118 (2018)

    Article  Google Scholar 

  22. G. Maggioni, D.R. Napoli, J. Eberth, M. Gelain, S. Carturan, M.G. Grimaldi, S. Tatì, Eur. Phys. J. A 51, 141 (2015)

    Article  ADS  Google Scholar 

  23. G.F. Knoll, Radiation Detection and Measurement, 2nd edition (J. Wiley & Sons, Inc., New York, 1989)

  24. V. Boldrini, Characterization of thermally-induced doping defects in bulk HPGe, in preparation

  25. R. Milazzo, G. Impellizzeri, D. Piccinotti, D. De Salvador, A. Portavoce, A. La Magna, G. Fortunato, D. Mangelinck, V. Privitera, A. Carnera, E. Napolitani, Appl. Phys. Lett. 110, 11905 (2017)

    Article  ADS  Google Scholar 

  26. V. Boldrini, S. Carturan, G. Maggioni, E. Napolitani, D.R. Napoli, R. Camattari, D. De Salvador, Appl. Surf. Sci. 392, 1173 (2017)

    Article  ADS  Google Scholar 

  27. S. Prucnal, L. Rebhole, W. Skorupa, Mater. Sci. Semicond. Process. 62, 115 (2017)

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to G. Maggioni.

Additional information

Communicated by C. Broggini

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Maggioni, G., Carturan, S., Raniero, W. et al. Pulsed laser diffusion of thin hole-barrier contacts in high purity germanium for gamma radiation detectors. Eur. Phys. J. A 54, 34 (2018). https://doi.org/10.1140/epja/i2018-12471-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1140/epja/i2018-12471-0