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The European Physical Journal Special Topics

, Volume 167, Issue 1, pp 3–10 | Cite as

Structural properties of Ge/Si(001) nano-islands by diffraction anomalous fine structure and multiwavelength anomalous diffraction

  • M.-I. Richard
  • N. A. Katcho
  • M. G. Proietti
  • H. RenevierEmail author
  • V. Favre-Nicolin
  • Z. Zhong
  • G. Chen
  • M. Stoffel
  • O. Schmidt
  • G. Renaud
  • T. U. Schülli
  • G. Bauer
Regular Article

Abstract

In the present paper, we aim to show the interest of combining Multiwavelength Anomalous Diffraction (MAD) and Diffraction Anomalous Fine Structure (DAFS) spectroscopy, in grazing incidence, to obtain structural properties (composition, strain and atomic ordering) of semiconductor heterostructures and nanostructures. As an example we report on preliminary results obtained on a series of Ge/Si(001) nano-island samples: pyramides and domes on nominal and prepatterned surfaces. For free standing domes, it is shown that the Ge content strongly depends on the growth condition with a tendency to increase from the bottom to the top of the nano-islands. There is also some indication of atomic ordering in the upper part of the islands. For small, capped pyramids, we show that the Diffraction Anomalous Fine Structure spectroscopy is the unique non destructive method that allows to recover the actual Ge content, the in-plane and out-of-plane strain and to detect atomic ordering.

Keywords

Monte Carlo European Physical Journal Special Topic Atomistic Simulation Grazing Incidence Germanium Oxide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© EDP Sciences and Springer 2009

Authors and Affiliations

  • M.-I. Richard
    • 1
    • 2
  • N. A. Katcho
    • 3
  • M. G. Proietti
    • 4
  • H. Renevier
    • 5
    Email author
  • V. Favre-Nicolin
    • 1
  • Z. Zhong
    • 6
  • G. Chen
    • 6
  • M. Stoffel
    • 7
  • O. Schmidt
    • 7
  • G. Renaud
    • 1
  • T. U. Schülli
    • 1
  • G. Bauer
    • 6
  1. 1.INACCEA-GrenobleFrance
  2. 2.ID01/ESRFGrenobleFrance
  3. 3.IQFR-CSIC, Dep. Quim. Inorganica – Universidad Complutense de MadridMadridSpain
  4. 4.ICMA, Dep. Fisica de la Materia Condensada, CSIC-Universidad de ZaragozaZaragozaSpain
  5. 5.LMGP, Grenoble INP – MinatecGrenobleFrance
  6. 6.Johannes Kepler Universität Linz, Institut für Halbleiter-und FestkörperphysikLinzAustria
  7. 7.Institute for Integrative NanosciencesStuttgartGermany

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