Advertisement

NiMnGa nanostructures produced by electron beam lithography and Ar-ion etching

  • D. Auernhammer
  • M. Schmitt
  • M. Ohtsuka
  • M. Kohl
Article

Abstract.

The technologies of electron beam lithography, dry etching and systems integration are investigated to fabricate a series of Ni-Mn-Ga double-beam structures designed with decreasing critical dimensions of 10 μm, 1 μm and 400 nm. Ni-Mn-Ga thin films of 1 μm thickness are deposited by magnetron sputtering and heat-treated in free-standing condition after selective removal of the substrate. Differential scanning calorimetry and electrical resistance measurements on the films show the characteristic features of martensitic transformation above room temperature. First optical beam deflection experiments demonstrate the magnetic and thermal actuation performance of the double-beam structures.

Keywords

PMMA Shape Memory Alloy European Physical Journal Special Topic Electron Beam Lithography Shape Memory Material 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. M. Kohl, B. Krevet, E. Just, Sensors Actuat. A 97-98, 646 (2002) Google Scholar
  2. M. Kohl, D. Brugger, M. Ohtsuka, T. Takagi, Sensors Actuat. 114, 445 (2004) Google Scholar
  3. M. Kohl, Shape Memory Microactuators (Springer-Verlag, 2004) Google Scholar
  4. K. Bhattacharya, R.D. James, Science 307, 53 (2005) Google Scholar
  5. C.P. Frick, T.W. Lang, K. Spark, K. Gall, Acta Mater. 54, 2223 (2006) Google Scholar

Copyright information

© EDP Sciences/Società Italiana di Fisica/Springer-Verlag 2008

Authors and Affiliations

  • D. Auernhammer
    • 1
  • M. Schmitt
    • 2
  • M. Ohtsuka
    • 3
  • M. Kohl
    • 1
    • 2
  1. 1.University of KarlsruheEggenstein-LeopoldshafenGermany
  2. 2.Forschungszentrum Karlsruhe, IMT, Postfach 3640KarlsruheGermany
  3. 3.Tohoku UniversitySendaiJapan

Personalised recommendations