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Manufacturing technology for the fabrication a discrete actuator using a magnetic shape memory alloy

  • B. Spasova
  • M. C. Wurz
  • H. H. Gatzen
Article

Abstract.

To demonstrate the feasibility of combining thin-film fabrication techniques and discrete MSM stripes, a hybrid actuator system was designed. The actuator system consists of four thin-film stators and two discrete MSM stripes mounted in a row. For creating an actuator motion, one of the MSM stripes has to be excited by a pair of stators to cause variant switching. This results in an elongation plus a compression of the second stripe and vice versa. The technologies required for fabricating the thin-film stator are sputter deposition, PECVD, electroplating, etching, and photolithography. This paper describes the fabrication process for a thin-film stator used for the MSM micro actuator system. It also presents technology study results indicating the feasibility of the planned fabrication sequence.

Keywords

European Physical Journal Special Topic Seed Layer Actuator System Chemical Mechanical Polishing Plasma Enhance Chemical Vapour Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© EDP Sciences/Società Italiana di Fisica/Springer-Verlag 2008

Authors and Affiliations

  • B. Spasova
    • 1
  • M. C. Wurz
    • 1
  • H. H. Gatzen
    • 1
  1. 1.Institute for Microtechnology (imt), Center for Production Technology, Leibniz Universitaet Hannover, An der Universitaet 2GarbsenGermany

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