Manufacturing technology for the fabrication a discrete actuator using a magnetic shape memory alloy
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To demonstrate the feasibility of combining thin-film fabrication techniques and discrete MSM stripes, a hybrid actuator system was designed. The actuator system consists of four thin-film stators and two discrete MSM stripes mounted in a row. For creating an actuator motion, one of the MSM stripes has to be excited by a pair of stators to cause variant switching. This results in an elongation plus a compression of the second stripe and vice versa. The technologies required for fabricating the thin-film stator are sputter deposition, PECVD, electroplating, etching, and photolithography. This paper describes the fabrication process for a thin-film stator used for the MSM micro actuator system. It also presents technology study results indicating the feasibility of the planned fabrication sequence.
KeywordsEuropean Physical Journal Special Topic Seed Layer Actuator System Chemical Mechanical Polishing Plasma Enhance Chemical Vapour Deposition
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