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Cross sections set and transport coefficients for Ar+ in Ar/CF4 mixtures

  • Željka D. Nikitović
  • Zoran M. Raspopović
  • Vladimir D. Stojanović
Regular Article
  • 16 Downloads

Abstract

In this letter, we present a cross section set for Ar+ in Ar/CF4 mixtures where existing experimentally obtained data are selected and extrapolated. A Monte Carlo simulation method is applied to accurately calculate transport parameters in hydrodynamic regime. We discuss new data for Ar+ ions in Ar/CF4 mixtures where mean energy, flux and bulk values of reduced mobility and other transport coefficients are given as a function of low and moderate reduced electric fields E/N (E-electric field, N-gas density).

Graphical abstract

Keywords

Plasma Physics 

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Copyright information

© EDP Sciences, SIF, Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  • Željka D. Nikitović
    • 1
  • Zoran M. Raspopović
    • 1
  • Vladimir D. Stojanović
    • 1
  1. 1.Institute of Physics, University of BelgradeBelgradeSerbia

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