Electron impact ionization cross section studies of C2Fx (x = 1 − 6) and C3Fx (x = 1 − 8) fluorocarbon species

  • Dhanoj Gupta
  • Heechol Choi
  • Mi-Young Song
  • Grzegorz P. Karwasz
  • Jung-Sik Yoon
Regular Article
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Part of the following topical collections:
  1. Topical Issue: Atomic and Molecular Data and their Applications

Abstract

The total ionization cross section for C2Fx (x = 1 − 6) and C3Fx (x = 1 − 8) fluorocarbon species are studied with the Binary-Encounter Bethe (BEB) model using various orbital parameters calculated from restricted/unrestricted Hartree-Fock (RHF/UHF) and Density Functional Theory (DFT). All the targets were optimized for their minimal structures and energies with several ab-initio methods with the aug-cc-pVTZ basis set. Among them, the present results with RHF/UHF orbital energies showed good agreement with the experimental results for stable targets C2F6, C2F4, C3F6 and C3F8. The results with the DFT (ωB97X/ωB97X-D) showed a reasonable agreement with the recent calculation of Bull et al. [J.N. Bull, M. Bart, C. Vallance, P.W. Harland, Phys. Rev. A 88, 062710 (2013)] for C2F6, C3F6 and C3F8 targets. The ionization cross section for C2F, C2F2, C2F3, C3F, C3F2, C3F3, C3F4, C3F5 and C3F7 were computed for the first time in the present study. We have also computed the vertical ionization potentials and polarizability for all the targets and compared them with other experimental and theoretical values. A good agreement is found between the present and the previous results. The calculated polarizability in turn is used to study the correlation with maximum ionization cross section and in general a good correlation is found among them, confirming the consistency and reliability of the present data. The cross section data reported in this article are very important for plasma modeling especially related to fluorocarbon plasmas.

Graphical abstract

Copyright information

© EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg 2017

Authors and Affiliations

  • Dhanoj Gupta
    • 1
  • Heechol Choi
    • 1
  • Mi-Young Song
    • 1
  • Grzegorz P. Karwasz
    • 2
  • Jung-Sik Yoon
    • 1
  1. 1.Plasma Technology Research Center, National Fusion Research InstituteJeollabuk-doSouth Korea
  2. 2.Institute of Physics, University Nicolaus CopernicusToruñPoland

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