The study of a homogeneous column of argon plasma at a pressure of 0.5 torr, generated by means of the Beenakker’s cavity

  • Irene L. Epstein
  • Marijana Gavrilović
  • Sonja Jovićević
  • Nikola Konjević
  • Yuri A. Lebedev
  • Alexey V. Tatarinov
Regular Article

Abstract

A homogeneous column of argon plasma at a pressure of 0.5 torr, generated by means of the Beenakker cavity, has been investigated by methods of emission spectroscopy, photography and self-consistent 3D modeling in a nonlocal approximation. It is shown that the plasma column, which spreads beyond the resonator, is spatially uniform and it represents the afterglow of the microwave discharge produced inside the cavity. The simulation data of the spatial distributions of the electron energy density and concentrations of electrons, ions and argon atoms in metastable and radiating states are presented. The results of calculations are in agreement with experimental data.

Keywords

Plasma Physics 

References

  1. 1.
    M. Moisan, J. Pelletier, Microwave excited plasmas (Elsevier, Amsterdam, 1992)Google Scholar
  2. 2.
    Yu.A. Lebedev, J. Moscow, Phys. Soc. 7, 267 (1997)Google Scholar
  3. 3.
    C.I.M. Beenakker, Spectrochim. Acta B 32, 173 (1977)ADSCrossRefGoogle Scholar
  4. 4.
    J.P.J. Van Dalen, P.A. de Lezenne Coulander, L. de Galan, Spectrochim. Acta B 33, 545 (1978)ADSCrossRefGoogle Scholar
  5. 5.
    I.P. Shkarofsky, T.W. Johnston, M.P. Bachynski, The Particle Kinetics of Plasmas (Addison-Wesley PC, 1996)Google Scholar
  6. 6.
    G.J.M. Hagelaar, L.C. Pitchford, Plasma Sources Sci. Technol. 14, 722 (2005)ADSCrossRefGoogle Scholar
  7. 7.
    A.A. Kudryavtsev, A.S. Smirnov, L.D. Tsendin, Physics of Glow Discharge (Lan’, St. Petersburg, 2010) [in Russian]Google Scholar
  8. 8.
    L.M. Biberman, V.S. Vorob’ev, I.T. Yakubov, Kinetiks of Nonequilibrium Low-Temperature Plasmas (Nauka, Moscow, 1982; Consultants Bureau, New York, 1987)Google Scholar
  9. 9.
    N.A. Dyatko et al., J. Phys. D 41, 055204 (2008)ADSCrossRefGoogle Scholar
  10. 10.
    A. Yanguas-Gil, J. Cortrino, L.L. Alves, J. Phys. D 38, 1588 (2005)ADSCrossRefGoogle Scholar
  11. 11.
    J.B. Boffard et al., Phys. Rev. A 59, 2749 (1999)ADSCrossRefGoogle Scholar
  12. 12.
    K. Bartschat, V. Zeman, Phys. Rev. A 59, R2552 (1999)ADSCrossRefGoogle Scholar
  13. 13.
    R.K. Gangwar, L. Sharma, R. Srivastava, A.D. Stauffer, J. Appl. Phys. 11, 053307 (2012)ADSCrossRefGoogle Scholar
  14. 14.
    H.W. Drawin, F. Emard, Physica C 85, 333 (1977)CrossRefGoogle Scholar
  15. 15.
    D. Rapp, P. Englander-Golden, J. Chem. Phys. 43, 1464 (1965)ADSCrossRefGoogle Scholar
  16. 16.
    H.A. Hyman, Phys. Rev. A A20, 855 (1979)ADSCrossRefGoogle Scholar
  17. 17.
    A.J. Dixon, M.F. Harrison, A.C.H. Smith, in Abstracts of the VIIIth ICPEAC, Belgrad, 1973, p. 405Google Scholar
  18. 18.
    E. Karoulina, Yu.A. Lebedev, J. Phys. D 25, 401 (1992)ADSCrossRefGoogle Scholar
  19. 19.
    C. Ferreira, J. Loureiro, A. Ricard, J. Appl. Phys. 57, 82 (1985)ADSCrossRefGoogle Scholar
  20. 20.
    H. van Tongeren, J. Appl. Phys. 45, 89 (1974)ADSCrossRefGoogle Scholar
  21. 21.
    T. Holstein, Phys. Rev. 72, 1212 (1947)ADSCrossRefMATHGoogle Scholar
  22. 22.
    P. Walsh, Phys. Rev. 116, 511 (1959)ADSCrossRefGoogle Scholar
  23. 23.
    N.B. Kolokolov, A.B. Blagoev, Usp. Fiz. Nauk 163, 55 (1993)CrossRefGoogle Scholar
  24. 24.
    N.B. Kolokolov, in Plasma chemistry, edited by B.M. Smirnov (Energoatomizdat, Moscow, 1985), Vol. 13 [in Russian]Google Scholar
  25. 25.
    Yu.A. Lebedev, L.S. Polak, High Energy Chem. 13, 331 (1980)Google Scholar
  26. 26.
    COMSOL 3.5a, http://www.comsol.com

Copyright information

© EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  • Irene L. Epstein
    • 1
  • Marijana Gavrilović
    • 2
  • Sonja Jovićević
    • 2
  • Nikola Konjević
    • 3
  • Yuri A. Lebedev
    • 1
  • Alexey V. Tatarinov
    • 1
  1. 1.Topchiev Institute of Petrochemical Synthesis RASMoscowRussia
  2. 2.Institute of Physics, University of BelgradeBelgradeSerbia
  3. 3.Faculty of Physics, University of BelgradeBelgradeSerbia

Personalised recommendations