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Dissociative electron attachment to titatinum tetrachloride and titanium tetraisopropoxide

  • Elías H. Bjarnason
  • Benedikt Ómarsson
  • Sarah Engmann
  • Frímann H. Ómarsson
  • Oddur IngólfssonEmail author
Regular Article
Part of the following topical collections:
  1. Topical issue: Electron and Positron Induced Processes

Abstract

Here we present a dissociative electron attachment study of titanium tetrachloride and titanium tetraisopropoxide in the incident electron energy range from about 0–18 eV. The results are compared to electron impact ionization and fragmentation of these compounds and discussed in relation to the role of secondary electrons in focused electron beam induced deposition. We also use the opportunity and describe in detail a recently constructed crossed beam apparatus for the study of the energy dependency of ion formation in low energy electron interaction with gas phase molecules.

Keywords

TiCl Dissociative Ionization Titanium Tetrachloride Titanium Tetraisopropoxide Dissociative Electron Attachment 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

References

  1. 1.
    W. Kroll, Trans. Electrochem. Soc. 78, 35 (1940)CrossRefGoogle Scholar
  2. 2.
    A.F. Hill, Organotransition Metal Chemistry, Tutorial chemistry texts (The Royal Society of Chemistry, Cambridge, 2002)Google Scholar
  3. 3.
    T. Katsuki, K.B. Sharpless, J. Am. Chem. Soc. 102, 5974 (1980) CrossRefGoogle Scholar
  4. 4.
    F. Babonneau, C. Sanchez, J. Livage, J. Non-Cryst. Solids 106, 170 (1988) ADSCrossRefGoogle Scholar
  5. 5.
    C.J. Taylor, D.C. Gilmer, D.G. Colombo, G.D. Wilk, S.A. Campbell, J. Roberts, W.L. Gladfelter, J. Am. Chem. Soc. 121, 5220 (1999) CrossRefGoogle Scholar
  6. 6.
    J. Winkler, Titanium Dioxide (Vincentz Network, Hannover, 2003)Google Scholar
  7. 7.
    A. Fujishima, K. Honda, Nature 238, 37 (1972)ADSCrossRefGoogle Scholar
  8. 8.
    X. Chen, S.S. Mao, Chem. Rev. 107, 2891 (2007) CrossRefGoogle Scholar
  9. 9.
    R.P. Chaukulkar, S. Agarwal, J. Vac. Sci. Technol. A 31, 031509 (2013) CrossRefGoogle Scholar
  10. 10.
    P. Evans, M.E. Pemble, D.W. Sheel, Chem. Mater. 18, 5750 (2006) CrossRefGoogle Scholar
  11. 11.
    I. Utke, P. Hoffmann, J. Melngailis, J. Vac. Sci. Technol. B 26, 1197 (2008) CrossRefGoogle Scholar
  12. 12.
    W.F. van Dorp, J.D. Wnuk, J.M. Gorham, D.H. Fairbrother, T.E. Madey, C.W. Hagen, J. Appl. Phys. 106, 074903 (2009) ADSCrossRefGoogle Scholar
  13. 13.
    S.H. Kim, G.A. Somorjai, J. Phys. Chem. B 106, 1386 (2002) CrossRefGoogle Scholar
  14. 14.
    P. Hoffmann, I. Utke, A. Perentes, T. Bret, C. Santschi, V. Apostolopoulos, Proc. SPIE 5925, 592506 (2005) CrossRefGoogle Scholar
  15. 15.
    W.J. Mitchell, E.L. Hu, J. Vac. Sci. Technol. B 17, 1622 (1999) CrossRefGoogle Scholar
  16. 16.
    W.J. Mitchell, E.L. Hu, J. Vac. Sci. Technol. B 20, 596 (2002)CrossRefGoogle Scholar
  17. 17.
    M. Schirmer, M.M. Walz, C. Papp, F. Kronast, A.X. Gray, B. Balke, S. Cramm, C.S. Fadley, H.P. Steinruck, H. Marbach, Nanotechnology 22, 475304 (2011) ADSCrossRefGoogle Scholar
  18. 18.
    M. Schirmer, M.M. Walz, F. Vollnhals, T. Lukasczyk, A. Sandmann, C. Chen, H.P. Steinruck, H. Marbach, Nanotechnology 22, 085301 (2011) ADSCrossRefGoogle Scholar
  19. 19.
    M. Schirmer, Ph.D. thesis, Faculty of Natural Sciences, Friedrich-Alexander-Universität Erlangen-Nürnberg, Germany (2012) Google Scholar
  20. 20.
    A. Perentes, T. Bret, I. Utke, P. Hoffmann, M. Vaupel, J. Vac. Sci. Technol. B 24, 587 (2006)CrossRefGoogle Scholar
  21. 21.
    E. Illenberger, J. Momigny, Gaseous Molecular Ions an Introduction to Elementary Processes Induced by Ionization (Steinkopff-Verlag, Darmstadt, 1992)Google Scholar
  22. 22.
    I. Bald, J. Langer, P. Tegeder, O. Ingolfsson, Int. J. Mass Spectrom. 277, 4 (2008)ADSCrossRefGoogle Scholar
  23. 23.
    J.D. Wnuk, J.M. Gorham, S.G. Rosenberg, W.F. van Dorp, T.E. Madey, C.W. Hagen, D.H. Fairbrother, J. Phys. Chem. C 113, 2487 (2009) CrossRefGoogle Scholar
  24. 24.
    K. Landheer, S.G. Rosenberg, L. Bernau, P. Swiderek, I. Utke, C.W. Hagen, D.H. Fairbrother, J. Phys. Chem. C 115, 17452 (2011) CrossRefGoogle Scholar
  25. 25.
    J.D. Wnuk, S.G. Rosenberg, J.M. Gorham, W.F. van Dorp, C.W. Hagen, D.H. Fairbrother, Surf. Sci. 605, 257 (2011) ADSCrossRefGoogle Scholar
  26. 26.
    S.G. Rosenberg, M. Barclay, D.H. Fairbrother, J. Phys. Chem. C 117, 16053 (2013) CrossRefGoogle Scholar
  27. 27.
    M. Allan, J. Chem. Phys. 134, 204309 (2011) ADSCrossRefGoogle Scholar
  28. 28.
    S. Engmann, M. Stano, S. Matejcik, O. Ingolfsson, Angew. Chem. Int. Ed. 50, 9475 (2011) CrossRefGoogle Scholar
  29. 29.
    S. Engmann, M. Stano, P. Papp, M.J. Brunger, S. Mateijcik, O. Ingolfsson, J. Chem. Phys. 138, 044305 (2013) ADSCrossRefGoogle Scholar
  30. 30.
    S. Engmann, M. Stano, S. Matejcik, O. Ingolfsson, Phys. Chem. Chem. Phys. 14, 14611 (2012) CrossRefGoogle Scholar
  31. 31.
    O. May, D. Kubala, M. Allan, Phys. Chem. Chem. Phys. 14, 2979 (2012) CrossRefGoogle Scholar
  32. 32.
    K. Wnorowski, M. Stano, W. Barszczewska, A. Jowko, S. Matejcik, Int. J. Mass Spectrom. 314, 42 (2012)ADSCrossRefGoogle Scholar
  33. 33.
    S. Engmann, B. Omarsson, M. Lacko, M. Stano, S. Matejcik, O. Ingolfsson, J. Chem. Phys. 138, 234309 (2013) ADSCrossRefGoogle Scholar
  34. 34.
    P. Papp, S. Engmann, M. Kucera, M. Stano, S. Matejcik, O. Ingolfsson, Int. J. Mass Spectrom. 356, 24 (2013)ADSCrossRefGoogle Scholar
  35. 35.
    S.L. Bennett, R.E. Pabst, J.L. Margrave, J.L. Franklin, Int. J. Mass Spectrom. 15, 451 (1974)Google Scholar
  36. 36.
    B.P. Mathur, E.W. Rothe, G.P. Reck, Int. J. Mass Spectrom. 31, 77 (1979)Google Scholar
  37. 37.
    J.A. Tossell, J.H. Moore, J.K. Olthoff, J. Phys. B 20, 565 (1987)ADSCrossRefGoogle Scholar
  38. 38.
    R.G. Egdell, A.F. Orchard, J. Chem. Soc. Faraday Trans. II 74, 485 (1978)CrossRefGoogle Scholar
  39. 39.
    A.A. Iverson, B.R. Russell, Spectrochim. Acta A 29, 715 (1973)ADSCrossRefGoogle Scholar
  40. 40.
    R. Basner, M. Schmidt, K. Becker, V. Tarnovsky, H. Deutsch, Thin Solid Films 374, 291 (2000) ADSCrossRefGoogle Scholar
  41. 41.
    V. Tarnovsky, R. Basner, M. Schmidt, K. Becker, Int. J. Mass Spectrom. 208, 1 (2001)ADSCrossRefGoogle Scholar
  42. 42.
    D.L. Azevedo, M.H.F. Bettega, L.G. Ferreira, M.A.P. Lima, J. Phys. B 33, 5467 (2000) ADSCrossRefGoogle Scholar
  43. 43.
    NIST Chemistry WebBook, NIST Standard Reference Database Number 69, edited by P.J. Linstrom, W.G. Mallard (National Institute of Standards and Technology, Gaithersburg, 2014), http://webbook.nist.gov/ghemistry
  44. 44.
    A. Stamatovic, G.J. Schulz, Rev. Sci. Instrum. 41, 423 (1970)ADSCrossRefGoogle Scholar
  45. 45.
    J.J. Zheng, X.F. Xu, D.G. Truhlar, Theor. Chem. Acc. 128, 295 (2011) CrossRefGoogle Scholar
  46. 46.
    F. Neese, Wiley Interdiscip. Rev.: Comput. Mol. Sci. 2, 73 (2012)Google Scholar
  47. 47.
    S. Grimme, J. Chem. Phys. 124, 034108 (2006) ADSCrossRefGoogle Scholar
  48. 48.
    C. Dijkgraaf, Spectrochim. Acta 21, 769 (1965)ADSCrossRefGoogle Scholar
  49. 49.
    H. Nakatsuji, M. Ehara, M.H. Palmer, M.F. Guest, J. Chem. Phys. 97, 2561 (1992) ADSCrossRefGoogle Scholar
  50. 50.
    R.S. Berry, C.W. Reimann, J. Chem. Phys. 38, 1540 (1963) ADSCrossRefGoogle Scholar
  51. 51.
    E.H. Bjarnason, F.H. Òmarsson, M. Hoshino, H. Tanaka, M.J. Brunger, P. Limao-Vieira, O. Ingolfsson, Int. J. Mass Spectrom. 339, 45 (2013)ADSCrossRefGoogle Scholar
  52. 52.
    E. Illenberger, Chem. Phys. Lett. 80, 153 (1981)ADSCrossRefGoogle Scholar
  53. 53.
    F.H. Òmarsson, E. Szymanska, N.J. Mason, E. Krishnakumar, O. Ingolfsson, Phys. Rev. Lett. 111, 063201 (2013) ADSCrossRefGoogle Scholar
  54. 54.
    F.H. Òmarsson, B. Reynisson, M.J. Brunger, M. Hoshino, H. Tanaka, P. Limão-Vieira, O. Ingólfsson, Int. J. Mass Spectrom. (2014), in press, Doi: 10.1016/j-ijms.2014.01.008
  55. 55.
    Y.R. Luo, Comprehensive Handbook of Chemical Bond Energies (CRC Press, Taylor & Francis Group, 2007) Google Scholar

Copyright information

© EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg 2014

Authors and Affiliations

  • Elías H. Bjarnason
    • 1
  • Benedikt Ómarsson
    • 1
  • Sarah Engmann
    • 1
  • Frímann H. Ómarsson
    • 1
  • Oddur Ingólfsson
    • 1
    Email author
  1. 1.Science Institute University of IcelandReykjavikIceland

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