Influence of ion-beam plasma on ion extraction efficiency in a single-grid ion source
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The influence of ion-beam plasma on ion extraction efficiency in a single-grid ICP ion source is researched. The single-grid ion source is considered as a system with two plasmas, ion-beam plasma and the source plasma, separated by an extraction grid. Results of experimental measurements of the potentials of the two plasmas and the ion beam current dependence on these potentials are presented. It is shown that the ion extraction efficiency depends equally on both the acceleration potential and on the potential of the ion-beam plasma. The obtained results demonstrate the key role of the ion-beam plasma in the ion source operation, which is important in technological applications and space thrusters.
KeywordsInductively Couple Plasma Beam Plasma Sheath Thickness Acceleration Potential Inductively Couple Plasma Source
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