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The European Physical Journal D

, Volume 54, Issue 2, pp 477–480 | Cite as

H-mode inductive coupling plasma for PVC surface treatment

  • F. CroccoloEmail author
  • A. Quintini
  • R. Barni
  • M. Ripamonti
  • A. Malgaroli
  • C. Riccardi
Topical issue: 23rd Symposium on Plasma Physics and Technology
  • 69 Downloads

Abstract

An inductively coupled plasma machine has been modified to be able to apply working powers in the order of 1 kW, thus switching to the real inductive H-mode. The plasma is generated by applying a 13.56 MHz radio-frequency to a λ/4 antenna outside the plasma chamber in low pressure conditions. The working gas is argon at pressure in the range from 10 to 100 Pa. With this high power source we have been able to perform plasma etching on a poly(vinyl-chloride) (PVC) film. In particular the effect of the plasma is the selective removal of hydrogen and chlorine from the sample surface. The action of the high power plasma on the sample has been proved to be much more effective than that of the low power one. Results similar to those obtained with the low power machine at about 300 W for 120 min, have been obtained with the high power source at about 600 W for 30 min. The superficial generation of a conductive layer of double C=C bonds was obtained. The samples have been investigated by means of ATR spectroscopy, FIB/SEM microscopy and micro-electrical measurements, which revealed the change in charge conductivity.

PACS

81.40.-z Treatment of materials and its effects on microstructure and properties 82.35.Cd Conducting polymers 52.40.Fd Plasma interactions with antennas; plasma-filled waveguides 52.77.-j Plasma applications 

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Copyright information

© EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg 2009

Authors and Affiliations

  • F. Croccolo
    • 1
    Email author
  • A. Quintini
    • 1
  • R. Barni
    • 1
  • M. Ripamonti
    • 2
  • A. Malgaroli
    • 2
  • C. Riccardi
    • 1
  1. 1.Dipartimento di Fisica “G. Occhialini”Universitá degli Studi di Milano-BicoccaMilanoItaly
  2. 2.Universitá Vita – Salute San RaffaeleMilanoItaly

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