The European Physical Journal D

, Volume 54, Issue 2, pp 377–382 | Cite as

Observations of extreme ultraviolet emission from plasma produced by capillary discharges

  • K. Nowakowska-LangierEmail author
  • L. Jakubowski
  • E. O. Baronova
  • K. Czaus
  • M. Rabinski
  • M. J. Jakubowski
Topical issue: 23rd Symposium on Plasma Physics and Technology


This study reports the results of a pilot experiment concerning observations of extreme ultraviolet emission from plasma produced by the capillary discharges. A few kA current was applied across the gas-filled alumina capillary (1 mm diameter and 8 mm long) to generate radiation in the EUV region (12–63 nm). Spectroscopic studies were carried out by means of a XEUV spectrometer which was upgraded for special lithography purposes. The results obtained from the EUV spectroscopic measurements provided information about the radiation processes from xenon and argon plasma and testifies that given capillary is an effective source of EUV emission. Additionally we showed a simulation which describes plasma dynamics parameters and dynamics of various ionization stages in capillary discharge. Our computer simulation confirmed the presence of ions, which spectra was registered in the experiment.


52.50.Dg Plasma sources 52.80.Yr Discharges for spectral sources (including inductively coupled plasma) 52.70.-m Plasma diagnostic techniques and instrumentation 


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. T. Beetz, M. Feser, H. Fleckenstein, B. Hornberger, C. Jacobsen, J. Kirz, M. Lerotic, E. Lima, M. Lu, D. Sayre, D. Shapiro, A. Stein, D. Tennant, S. Wirick, Synchrotron Radiat. News 16, 11 (2003) Google Scholar
  2. T. Mocek, H.J. Shin, D.G. Lee, C.M. Kim, Y.H. Cha, K.H. Hong, C.H. Nam, B. Rus, Lasers and Electro-Optics, CLEO/Pacific Rim apos 99, The Pacific Rim Conference 3, 928 (1999) Google Scholar
  3. S.R. Mohanty, E. Robert, R. Dussart, R. Viladrosa, J.-M. Pouvesle, C. Fleurier, C. Cachoncinlle, Microelectron. Eng. 65, 47 (2003) Google Scholar
  4. K. Kemp, S. Wurm, C.R. Physique 7, 875 (2006) Google Scholar
  5. R. Lebert, K. Bergmann, G. Schriever, W. Neff, Microelectron. Eng. 46, 449 (1999) Google Scholar
  6. V.Y. Banine, J.P.H. Benschop, H.G.C. Werij, Microelectron. Eng. 53, 681 (2000) Google Scholar
  7. M. Favre, P. Choi, H. Chuaqui, I. Mitchell, E. Wyndham, A.M. Lenero, Plasma Sources Sci. Technol. 12, 78 (2003) Google Scholar
  8. K. Kolacek, J. Schmidt, V. Bohacek, M. Ripa, A.A. Rupasov, A.S. Shikanov, P. Kubes, J. Kravarik, Plasma Phys. Rep. 29, 290 (2003) Google Scholar
  9. J.J. Rocca, D.C. Beethe, M.C. Marconi, Opt. Lett. 13, 565 (1988) Google Scholar
  10. C. Steden, H.-J. Kunze, Phys. Lett. A 151, 534 (1990) Google Scholar
  11. D. Hong, R. Dussart, C. Cachoncinlle, W.E. Rosenfeld, S. Götze, J. Pons, R. Viladrosa, C. Fleurier, J.-M. Pouvesle, Rev. Sci. Intrum. 71, 15 (2000) Google Scholar
  12. S.S. Ellwi, L. Juschkin, S. Ferri, H.-J. Kunze, K.N. Koshelev, E. Louis, J. Phys. D 34, 336 (2001) Google Scholar
  13. J.J. Rocca, M.C. Marconi, F.G. Tomasel, IEEE J. Quant. Elect. 29, 182 (1993) Google Scholar
  14. S. Götze, S. Ellwi, Andreic, R. Dussart, J. Pons, R. Viladrosa, J.-M. Pouvesle, C. Fleurier, H.-J. Kunze, Phys. Lett. A 299, 571 (2002) Google Scholar
  15. E.O. Baronowa, M.M. Stepanenko, N.R. Pereira, Rev. Sci. Instrum. 72, 1416 (2001) Google Scholar
  16. J. Schmidt, K. Kolacek, V. Bohacek, M. Ripa, V. Prukner, O. Frolov, J. Straus, First Cairo Conference on Plasma Physics Applications, Cairo, Egypt (2003), p. 15 Google Scholar
  17. NIST Atomic Spectra Database Google Scholar
  18. A.L. Soto, P. Silva, G. Sylwester, J. Moreno, A. Esaulov, A. Nazarenko, Rev. Mex. Fis. 48, 142 (2002) Google Scholar
  19. E.O. Baronova, V.V. Vikhrev, Capillary discharge - modelling of plasma dynamics. Proc. of 6th Conference on Dense Z-pinches, Oxford, United Kingdom (2005), p. 251 Google Scholar
  20. B.L. Henke, E.M. Gullikson, J.C. Davis, At. Data Nucl. Data Tab. 54, 181 (1993) Google Scholar

Copyright information

© EDP Sciences, SIF, Springer-Verlag Berlin Heidelberg 2009

Authors and Affiliations

  • K. Nowakowska-Langier
    • 1
    Email author
  • L. Jakubowski
    • 1
  • E. O. Baronova
    • 2
  • K. Czaus
    • 1
  • M. Rabinski
    • 1
  • M. J. Jakubowski
    • 1
  1. 1.The Andrzej Soltan Institute for Nuclear Studies (IPJ)Otwock-SwierkPoland
  2. 2.Nuclear Fusion Institute, NRC Kurchatov InstituteMoscowRussia

Personalised recommendations