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The European Physical Journal D

, Volume 43, Issue 1–3, pp 165–168 | Cite as

MD simulations of the cluster beam deposition of porous Ge

  • A. HarjunmaaEmail author
  • J. Tarus
  • K. Nordlund
  • J. Keinonen
Clusters and Surfaces

Abstract.

The low-energy cluster beam deposition of Ge clusters on a Si surface was simulated using classical molecular dynamics. In an effort to find a suitable energy range to construct porous Ge films, the porosity of the resulting layers was mapped as a function of deposition energy. It was discovered that the energies of interest to produce porosities in the range of 30% to 70% were between about 10 meV and 500 meV per atom. Also, it became clear that the number of deposited clusters must be above 40 for the calculated porosities to be accurate. In addition, transmission electron microscope image simulations were performed on the deposited samples, and images of porous and non-porous layers were found to be distinctly different.

PACS.

68.37.Lp Transmission electron microscopy (TEM) 81.05.Rm Porous materials 

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References

  1. L.T. Canham, Appl. Phys. Lett. 57, 1046 (1990) CrossRefADSGoogle Scholar
  2. R. Venkatasubramanian, D.P. Malta, M.L. Timmons, J.A. Hutchby, Appl. Phys. Lett. 59, 1603 (1991) CrossRefADSGoogle Scholar
  3. A. Ksendzov, R.W. Fathauer, T. George, W.T. Pike, R.P. Vasquez, A.P. Taylor, Appl. Phys. Lett. 63, 200 (1993) CrossRefADSGoogle Scholar
  4. T. Matsumoto, J. Takahashi, T. Tamaki, T. Futagi, H. Mimura, Y. Kanemitsu, Appl. Phys. Lett. 64, 226 (1994) CrossRefADSGoogle Scholar
  5. P.M. Fauchet, J. von Behren, Phys. Stat. Sol. B 204, R7 (1997) Google Scholar
  6. P. Mélinon, V. Paillard, V. Dupuis, A. Perez, P. Jensen, A. Hoareau, M. Broyer, J.L. Vialle, M. Pellarin, B. Baguenard, J. Lermé, Int. J. Mod. Phys. B 9, 339 (1995) CrossRefADSGoogle Scholar
  7. J.R. Heath, Y. Liu, S.C. O'Brien, Q.-L. Zhang, R.F. Curl, F.K. Tittel, R.E. Smalley, J. Chem. Phys. 83, 5520 (1985) CrossRefADSGoogle Scholar
  8. K. Fuke, K. Tsukamoto, F. Misaizu, M. Sanekata, J. Chem. Phys. 99, 7807 (1993) CrossRefADSGoogle Scholar
  9. A.A. Seraphin, S.-T. Ngiam, K.D. Kolenbrander, J. Appl. Phys. 80, 6429 (1996) CrossRefADSGoogle Scholar
  10. G. Ledoux, O. Guillois, D. Porterat, C. Reynaud, F. Huisken, B. Kohn, V. Paillard, Phys. Rev. B 62, 15942 (2000) CrossRefADSGoogle Scholar
  11. P. Mélinon, P. Kéghélian, B. Prével, A. Perez, G. Guiraud, J. LeBrusq, J. Lermé, M. Pellarin, M. Broyer, J. Chem. Phys. 107, 10278 (1997) CrossRefGoogle Scholar
  12. P. Mélinon, P. Kéghélian, B. Prével, V. Dupuis, A. Perez, B. Champagnon, Y. Guyot, M. Pellarin, J. Lermé, M. Broyer, J.L. Rousset, P. Delichère, J. Chem. Phys. 108, 4607 (1998) CrossRefADSGoogle Scholar
  13. D. Amans, S. Callard, A. Gagnaire, J. Joseph, G. Ledoux, F. Huisken, J. Appl. Phys. 93, 4173 (2003) CrossRefADSGoogle Scholar
  14. H. Haberland, Z. Insepov, M. Moseler, Phys. Rev. B 51, 11061 (1995) CrossRefADSGoogle Scholar
  15. F. Voigt, R. Brüggemann, T. Unold, F. Huisken, G.H. Bauer, Mater. Sci. Eng. C 25, 584 (2005) CrossRefMathSciNetGoogle Scholar
  16. M.G. Berger, C. Dieker, M. Thonissen, L. Vescan, H. Luth, H. Munder, W. Theiss, M. Wernke, P. Grosse, J. Phys. D 27, 1333 (1994) CrossRefADSGoogle Scholar
  17. A. Loni, L.T. Canham, M.G. Berger, R. Arens-Fischer, H. Munder, H. Luth, H.F. Arrand, T.M. Benson, Thin Solid Films 276, 143 (1996) CrossRefGoogle Scholar
  18. J. Tersoff, Phys Rev. B 39, 5566 (1989) CrossRefADSGoogle Scholar
  19. H.J.C. Berendsen, J.P.M. Postma, W.F. van Gunsteren, A. DiNola, J.R. Haak, J. Chem. Phys. 81, 3684 (1984) CrossRefADSGoogle Scholar
  20. K. Kordás, A.E. Pap, Sz. Beke, S. Leppävuori, Opt. Mater. 25, 251 (2004) CrossRefADSGoogle Scholar
  21. P. Stadelmann, Ultramicroscopy 21, 131 (1987) CrossRefGoogle Scholar
  22. A.G. Cullis, L.T. Canham, Nature 353, 335 (1991) CrossRefADSGoogle Scholar

Copyright information

© EDP Sciences/Società Italiana di Fisica/Springer-Verlag 2007

Authors and Affiliations

  • A. Harjunmaa
    • 1
    Email author
  • J. Tarus
    • 2
  • K. Nordlund
    • 1
  • J. Keinonen
    • 1
  1. 1.Accelerator Laboratory, University of HelsinkiHelsinkiFinland
  2. 2.CSC – Scientific Computing Ltd.EspooFinland

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