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Obtaining ZnO-based Transparent Conductive Films with Improved Functional Properties

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Abstract

A comparative study of the growth process of transparent conductive films based on Ga-doped ZnO is carried out during the magnetron sputtering of a traditional ZnO:Ga ceramic target and ZnO:Ga–Zn composite targets with a Zn metal phase content of 10 to 30 wt %. The influence of the composition of composite targets and substrate temperature on the functional characteristics and microstructure of transparent conductive films is studied. It is demonstrated that an increase in the zinc content in the composition of the composite target when the substrate is heated to 200°C and above helps to improve the structural perfection of ZnO:Ga films and reduce their resistivity due to an increase in the concentration of charge carriers against the background of a high value of Hall mobility. All ZnO:Ga films obtained by sputtering composite targets at a substrate temperature of 200°C and above demonstrate high optical transmittance in the visible region.

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REFERENCES

  1. B. Lewis and D. Paine, MRS Bull. 25, 22 (2000). https://doi.org/10.1557/mrs2000.147

    Article  CAS  Google Scholar 

  2. U. Betz, M. Kharrazi Olsson, J. Marthy, et al., Surf. Coat. Technol. 200, 5751 (2006). https://doi.org/10.1016/j.surfcoat.2005.08.144

    Article  CAS  Google Scholar 

  3. K. Portillo-Cortez, S. R. Islas, A. Serrano-Lázaro, et al., Appl. Surf. Sci. Adv. 9, 100255 (2022). https://doi.org/10.1016/j.apsadv.2022.100255

  4. A. I. Hofmann, E. Cloutet, and G. Hadziioannou, Adv. Electron. Mater. 4, 1700412 (2018). https://doi.org/10.1002/aelm.201700412

  5. P. Lippens, M. Büchel, D. Chiu, et al., Thin Solid Films 532, 94 (2013). https://doi.org/10.1016/j.tsf.2012.12.116

    Article  CAS  ADS  Google Scholar 

  6. P. Misra, V. Ganeshan, and N. Agrawal, J. Alloys Compd. 725, 60 (2017). https://doi.org/10.1016/j.jallcom.2017.07.121

    Article  CAS  Google Scholar 

  7. H. Liu, X. Wang, M. Li, et al., Ceram. Int. 46, 11978 (2020). https://doi.org/10.1016/j.ceramint.2020.01.237

    Article  CAS  Google Scholar 

  8. A. K. Akhmedov, A. Sh. Asvarov, et al., Surface: X‑Ray, Synchrotron and Neutron Studies 15, 76–80 (2021). https://doi.org/10.31857/S1028096021010027

    Article  Google Scholar 

  9. A. Sh. Asvarov, A. K. Akhmedov, E. K. Murliev, et al., Prikl. Fiz., No. 3, 73 (2022). https://doi.org/10.51368/1996-0948-2022-3-73-78

  10. A. K. Akhmedov, A. Kh. Abduev, A. Sh. Asvarov, et al., Nanotechnologies in Russia 15, 741–746 (2020). https://doi.org/10.1134/S1992722320060023

    Article  CAS  Google Scholar 

  11. V. V. Brus, Z. D. Kovalyuk, and P. D. Maryanchuk, Tech. Phys. 57, 1148–1151 (2012).

    Article  CAS  Google Scholar 

  12. T. P. Rao and M. C. S. Kumar, J. Alloys Compd. 506, 788 (2010). https://doi.org/10.1016/j.jallcom.2010.07.071

    Article  CAS  Google Scholar 

  13. R. A. Afre, N. Sharma, M. Sharon, et al., Rev. Adv. Mater. Sci. 53, 79 (2018).

    Article  CAS  Google Scholar 

  14. J. I. Langford and A. J. C. Wilson, J. Appl. Crystallogr. 11, 102 (1978). https://doi.org/10.1107/S0021889878012844

    Article  CAS  ADS  Google Scholar 

  15. L.-J. Meng, J. Gao, and R. A. Silva, et al., Thin Solid Films 516, 5454 (2008).

    Article  CAS  ADS  Google Scholar 

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Funding

The work was carried out within the framework of state assignments of the Dagestan Federal Research Center, Russian Academy of Sciences, and the Federal Research Center “Crystallography and Photonics,” Russian Academy of Sciences. The work was carried out using equipment of the Shared Use Center of the Federal Scientific Research Center “Crystallography and Photonics” and the Analytical Center for Collective Use of the Dagestan Federal Research Center.

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Authors and Affiliations

  1. Amirkhanov Institute of Physics, Dagestan Federal Research Center, Russian Academy of Sciences, Makhachkala, Russia

    A. K. Akhmedov & A. Sh. Asvarov

  2. Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,” Russian Academy of Sciences, Moscow, Russia

    A. Sh. Asvarov, A. E. Muslimov & V. M. Kanevsky

Authors
  1. A. K. Akhmedov
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  2. A. Sh. Asvarov
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  3. A. E. Muslimov
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  4. V. M. Kanevsky
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Correspondence to A. K. Akhmedov or A. Sh. Asvarov.

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Akhmedov, A.K., Asvarov, A.S., Muslimov, A.E. et al. Obtaining ZnO-based Transparent Conductive Films with Improved Functional Properties. Nanotechnol Russia 18, 865–871 (2023). https://doi.org/10.1134/S2635167623600268

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  • DOI: https://doi.org/10.1134/S2635167623600268

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