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Laser-Plasma Chemistry

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Abstract—

Most currently existing laser methods for separating plates into crystals are analyzed. A technique for eliminating overheating of the substrate, its melting, modification, and release of material to the surface is proposed: local laser-plasma-chemical etching using the example of polycrystalline diamond and single-crystal sapphire. The operating pressure range is 6 × 10–4–1 × 10–1 Torr.

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Authors and Affiliations

  1. Mokerov Institute of Ultra-High Frequency Semiconductor Electronics, Russian Academy of Sciences, Moscow, Russia

    S. V. Red’kin

  2. Russian Technological University — MIREA, Moscow, Russia

    S. V. Red’kin

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  1. S. V. Red’kin
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Correspondence to S. V. Red’kin.

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Translated by N. Saetova

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Red’kin, S.V. Laser-Plasma Chemistry. Nanotechnol Russia 17 (Suppl 1), S61–S67 (2022). https://doi.org/10.1134/S2635167622070163

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  • DOI: https://doi.org/10.1134/S2635167622070163

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