Skip to main content

Effects of PLL Architecture on MEMS Gyroscope Performance

Gyroscopy and Navigation volume 13, pages 44–52 (2022)Cite this article

Abstract

Phase-Locked Loops (PLL) may be included into modern MEMS gyroscopes to provide excitation of inertial mass oscillations, as well as to form clock signal for digital signal processing in an integrated circuit. This paper considers the impact of PLL architecture on MEMS gyroscope performance and its estimation. It is shown that the proposed Double Sampling Phase-Locked Loop (DSPLL) architecture makes it possible to improve the accuracy of MEMS gyroscopes due to high synchronization rate, as well as higher frequency stability as compared to the widely used Charge Pump Phase-Locked Loop (CP-PLL) and the Sampling Phase-Locked Loop (SPLL).

This is a preview of subscription content, access via your institution.

Access options

Buy single article

Instant access to the full article PDF.

USD 39.95

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.
Fig. 6.
Fig. 7.
Fig. 8.
Fig. 9.
Fig. 10.
Fig. 11.
Fig. 12.

REFERENCES

  1. Peshekhonov, V.G., The outlook for gyroscopy, Gyroscopy and Navigation, 2020, no. 11, pp. 193–197.

  2. Raspopov, V.Ya., Micromechanical devices. Tutorial (Mikromekhanicheskie pribory. Uchebnoe posobie), 2nd ed., Tula State University, K.E. Tsiolkovsky Moscow State Technological University, Tula: Grif and K, 2004.

  3. Tulaev, A.T., Styazhkina, A.V., Kozlov, A.S., and Belyaev Ya.V., Technique for designing a micromechanical sensor based on an integrated system model, Informatika, telekommunikatsii i upravlenie, 2021, 14(2), pp. 79–92.

  4. Liu, K., Zhang, W., Chen, W., Li, K., Dai, F., Cui, F., Wu, X., Ma, G., and Xiao Q., TOPICAL REVIEW: The development of micro-gyroscope technology. Journal of Micromechanics and Microengineering, 2009, 19(11), pp. 1–29.

    Google Scholar 

  5. Koenig, S., Rombach, S., Gutmann, W., Jaeckle, A., Weber, C., Ruf, M., Grolle, D., and Rende, J., Towards a navigation grade Si-MEMS gyroscope. 2019 DGON Inertial Sensors and Systems (ISS), pp. 1–18.

  6. Aaltonen, L. and Halonen, K.A.I., An analog drive loop for a capacitive MEMS gyroscope, Analog Integrated Circuits and Signal Processing. 2010. 63(3), pp. 465–476.

  7. Aaltonen, L., Saukoski, M., Teikari, I., and Halonen, K., Noise analysis of comparator performed sine-to-square conversion, 2006 International Biennial Baltic Electronics Conference, IEEE, 2006, pp. 1–4.

  8. Belyaev, Ya.V., Methods for reducing the sensitivity threshold of a micromechanical gyroscope, Cand. Tech. Sci. Dissertation, St. Peterburg, 2010, 129 p.

  9. Sharma, A., Zaman, M.F., Amini, B., and Ayazi, F., A High-Q In-Plane SOI Tuning Fork Device, Proc. IEEE Conference on Sensors, October 2004, pp. 467–470.

  10. Filimonov, A.B. and Filimonov, N.B., Robust control with “deep” feedback. Proc. XIII All-Russian Conference on Control Problems, VSPU-2019, Moscow, 2019.

  11. Meerov, M.V., Sintez struktur sistem avtomaticheskogo regulirovaniya vysokoi tochnosti (Synthesis of structures of automatic high-accuracy control systems), Moscow: Nauka, 1967.

  12. Chen, F., Li, X., and Kraft, M., Electromechanical sigma–delta modulators force feedback interfaces for capacitive MEMS inertial sensors: A review, IEEE Sensors Journal, 2016, vol. 16, no. 17, pp. 6476–6495.

    Article  Google Scholar 

  13. Omar, A., Elshennawy, A., Ismail, A., Nagib, M., Elmala, M., and Elsayed, A., New versatile hardware platform for closed-loop gyro evaluation. Proc. Inertial Sensors and Systems 2015 (DGON ISS), 2015.

    Google Scholar 

  14. Marx, M., Dorigo, D.D., Nessler, S., Rombach, S., and Manoli, Y.A., 27 μW 0.06 mm2 background resonance frequency tuning circuit based on noise observation for a 1.71 mW CT-Delta Sigma MEMS gyroscope readout system with 0.9°/h bias instability, IEEE J. Solid-State Circuits, 2018. 53(1), pp. 174–186.

    Article  Google Scholar 

  15. Kolumban, G., Frigyik, B., and Kennedy, M.P., Design equations and baseband model for double-sampling phase-locked loop, 6th IEEE Int. Conf. on Electronics, Circuits and Systems. Proc. Vol. 2, 1999, pp. 895–898.

  16. Kuznetsov, N.V., Belyaev, Ya.V., Indeitsev, D.A., Lobachev, M.Yu., Lukin, A.V., Popov, I.A., Yuldashev, M.V., and Yuldashev, R.V., Mathematical simulation of oscillations and information processing control systems in MEMS gyroscopes, XIV All-Russian Multiconference on Control Problems, MKPU-2021, 2021.

  17. Leonov, G.A. and Kuznetsov, N.V., Nonlinear Mathematical Models of Phase-Locked Loops. Stability and Oscillations, Cambridge Scientific Publisher: Cambridge, 2014.

    Google Scholar 

  18. Kuznetsov, N.V., Matveev, A.S., Yuldashev, M.V., and Yuldashev, R.V., Nonlinear analysis of charge-pump phase-locked loop: The hold-in and pull-in ranges, IEEE Transactions on Circuits and Systems I: Regular Papers, 2021, 68(10), pp. 4049–4061.

    Article  Google Scholar 

Download references

Funding

This work was supported by the Leading Scientific School of the Russian Federation, project Sh-4196.2022.1.1 and Grant SPbU (Pure ID 75207094, sections 4–6).

Author information

Authors and Affiliations

  1. Saint Petersburg State University, St. Petersburg, Russia

    N. V. Kuznetsov, M. V. Yuldashev & R. V. Yuldashev

  2. Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, St. Petersburg, Russia

    N. V. Kuznetsov

  3. Concern CSRI Elektropribor, JSC, St. Petersburg, Russia

    Ya. V. Belyaev, A. V. Styazhkina & A. T. Tulaev

Authors
  1. N. V. Kuznetsov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ya. V. Belyaev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. V. Styazhkina
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. T. Tulaev
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. M. V. Yuldashev
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. R. V. Yuldashev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding authors

Correspondence to N. V. Kuznetsov or Ya. V. Belyaev.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Kuznetsov, N.V., Belyaev, Y.V., Styazhkina, A.V. et al. Effects of PLL Architecture on MEMS Gyroscope Performance. Gyroscopy Navig. 13, 44–52 (2022). https://doi.org/10.1134/S2075108722010047

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S2075108722010047