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The Formation of Spherical and Tree Particles during Diamond Growth by Chemical Vapor Deposition

Abstract

A model is proposed for the formation of spherical and treelike particles during the growth of diamond films by chemical vapor deposition (CVD) using a direct current electric discharge to activate. Spherical diamond particles are formed when the surface energies of different diamond faces are equal, which arises during growth with a certain temperature, depending on the parameters of the gaseous medium. The growth of tree particles is created by the movement of charged particles along the lines of the electric field.

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ACKNOWLEDGMENTS

The experimental study of the obtained samples was carried out on the equipment of the Center for Collective Use of the Frumkin Institute of Physical Chemistry and Electrochemistry, Russian Academy of Sciences.

Funding

This work was financially supported by the Ministry of Education and Science of the Russian Federation, project no. АААА-А19-119011790097-9.

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Correspondence to A. V. Shapagin or B. V. Spitsyn.

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Blaut-Blachev, A.N., Averin, A.A., Shapagin, A.V. et al. The Formation of Spherical and Tree Particles during Diamond Growth by Chemical Vapor Deposition. Prot Met Phys Chem Surf 57, 760–763 (2021). https://doi.org/10.1134/S2070205121040079

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