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Elemental analysis of coatings by high-frequency glow discharge optical emission spectroscopy

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Abstract

The physical basics of glow discharge optical emission spectroscopy are considered. The scheme of the system used for chemical analysis of coatings by glow discharge optical emission spectroscopy is described by the example of a Profiler 2 instrument (Horiba Jobin Yvon). Various types of coatings and methods for surface treatment are compared. On the basis of these studies, it is established that, under the basic measuring regimes without fine adjustment of sputtering parameters, the maximum analyzed depth of coatings is around 80 μm and the depth resolution is 10–20 nm. Almost any combinations of substrate and coating materials, including ceramics, glasses, and polymers, can be analyzed.

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Authors and Affiliations

  1. National University of Science and Technology “MISIS”National University of Science and Technology, Leninsky pr. 4, Moscow, 119049, Russia

    Ph. V. Kiryukhantsev-Korneev

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  1. Ph. V. Kiryukhantsev-Korneev
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Correspondence to Ph. V. Kiryukhantsev-Korneev.

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Original Russian Text © Ph.V. Kiryukhantsev-Korneev, 2012, published in Fizikokhimiya Poverkhnosti i Zashchita Materialov, 2012, Vol. 48, No. 5, pp. 488–494.

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Kiryukhantsev-Korneev, P.V. Elemental analysis of coatings by high-frequency glow discharge optical emission spectroscopy. Prot Met Phys Chem Surf 48, 585–590 (2012). https://doi.org/10.1134/S207020511205005X

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  • DOI: https://doi.org/10.1134/S207020511205005X

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