Abstract
The effect of heat treatment on the structure and chemical and phase composition of tantalum-containing films with a silicon-carbon matrix has been studied by high-resolution transmission electron microscopy (HRTEM), energy dispersive microanalysis, ultrasoft X-ray emission spectroscopy (USXES), and electron energy-loss spectroscopy (EELS). It was shown that the main cause of the heat treatment influence is the interaction of the material with oxygen. A model of the processes that occur and a method for improving the thermal stability of silicon-carbon nanocomposites are proposed.
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Original Russian Text © M.Yu. Presniakov, A.I. Popov, D.S. Usol’tseva, M.L. Shupegin, A.L. Vasiliev, 2014, published in Rossiiskie Nanotekhnologii, 2014, Vol. 9, Nos. 9–10.
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Presniakov, M.Y., Popov, A.I., Usol’tseva, D.S. et al. Thermal stability of metal-silicon-carbon nanocomposites. Nanotechnol Russia 9, 518–532 (2014). https://doi.org/10.1134/S1995078014050139
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DOI: https://doi.org/10.1134/S1995078014050139