Abstract
We consider an algorithm for monitoring the process of sputter deposition of optical coatings based on the analysis of sample data of broadband measurements for a fixed set of wavelengths. On the one hand, the considered algorithm uses broadband measurement data, which is an advantage compared to using only monochromatic measurement data for one fixed wavelength, and on the other hand, it is fast compared to algorithms that use complete broadband measurement data. It has been demonstrated that the proposed algorithm allows one to obtain fairly accurate estimates of the layer thicknesses in deposited multilayer optical coatings.
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Funding
This work was financially supported by the Russian Science Foundation, project 21-11-00011, https://rscf.ru/en/project/21-11-00011/.
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Translated by V. Potapchouck
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Shinkarev, V.D., Lukyanenko, D.V., Tikhonravov, A.V. et al. Algorithm for Monitoring Optical Coating Sputter Deposition Based on Broadband Measurement Sample Data. J. Appl. Ind. Math. 17, 608–615 (2023). https://doi.org/10.1134/S1990478923030146
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DOI: https://doi.org/10.1134/S1990478923030146