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Peculiarities of the formation of planar micro-optic elements on porous glass substrates under the effect of laser radiation followed by sintering

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Abstract

The theoretical and practical approaches to the formation of micro-optic elements (MOE) for the integrated optical communication on substrates made of different materials, including silicate glasses, have been reviewed. The applicability of high-silica porous glasses (PG) fabricated by a homogeneous acid leaching of two-phase alkali borosilicate glasses as basic matrices for laser formation of MOE of different types (microlenses and microchannels) has been discussed. It has been demonstrated that sintering laser-modified PGs at temperatures ensuring the collapse of the pore can be used to stabilize MOE optical properties. The results of choosing the time-temperature mode for sintering PG substrates with a planar MOE-strip waveguide (SW) providing the SW fixation on a completely sintered substrate were presented.

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Authors and Affiliations

  1. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, nab. Makarova 2, St. Petersburg, 199034, Russia

    T. V. Antropova, M. A. Girsova & I. N. Anfimova

  2. National Research University of Information Technologies, Mechanics, and Optics, Kronverkskii pr. 49, St. Petersburg, 197101, Russia

    V. P. Veiko, G. K. Kostyuk, V. A. Chuiko & E. B. Yakovlev

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  1. T. V. Antropova
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  2. V. P. Veiko
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  3. G. K. Kostyuk
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  4. M. A. Girsova
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  5. I. N. Anfimova
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  6. V. A. Chuiko
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  7. E. B. Yakovlev
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Correspondence to T. V. Antropova.

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Original Russian Text © T.V. Antropova, V.P. Veiko, G.K. Kostyuk, M.A. Girsova, I.N. Anfimova, V.A. Chuiko, E. B. Yakovlev, 2012, published in Fizika i Khimiya Stekla.

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Antropova, T.V., Veiko, V.P., Kostyuk, G.K. et al. Peculiarities of the formation of planar micro-optic elements on porous glass substrates under the effect of laser radiation followed by sintering. Glass Phys Chem 38, 478–490 (2012). https://doi.org/10.1134/S1087659612060028

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