Skip to main content
Log in

Specific features of the structure of sol-gel silicate films doped with Mn and Pt

  • Published:
Glass Physics and Chemistry Aims and scope Submit manuscript

Abstract

Sol-gel silicate films undoped and doped with Mn and Pt are investigated by X-ray photoelectron spectroscopy and atomic-force microscopy. The effect of the annealing atmosphere on the composition and structure of doped silicate films is discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Bubnov, Yu.Z., Chepik, L.F., Shilova, O.A., and Vishevnik, L.N., Application of Sol-Gel Technology for Fabrication of Thin-Film Gas Sensors, in Trudy XVII Soveshchaniya “Temperaturoustoichivye funktsional’nye pokrytiya,” Tom 1. Plenarnye doklady (Proceedings of the XVII Conference “Heat-Resistant Functional Coatings” (Oral Talks)), St. Petersburg: OOP NIIKh St. Petersburg Gos. Univ., 1997, vol. 1, pp. 99–104.

    Google Scholar 

  2. Shilova, O.A. and Bubnov, Yu.Z., Sol-Gel Technology for Preparation of Spin-on Glass Films in a Cycle of Manufacturing Gas Sensors, in New Developments on Sensors for Environmental Control (ENVSENS), Siciliano, P., Ed., Singapore: Word Scientific, 2003, pp. 90–95.

    Google Scholar 

  3. Shilova, O.A., “Spin-on Glass” Films for Semiconductor Technology, Surf. Coat. Int., Part B: Coat. Trans., 2003, vol. 86, no. 3, pp. 195–202.

    CAS  Google Scholar 

  4. Bubnov, Yu.Z. and Shilova, O.A., Nanometer-Sized Vitreous Films Designed for Multifunctional Purposes in Technology for Fabricating Semiconductor Gas Sensors, Tekhnol. Prib., 2003, no. 3 (7), pp. 60–71.

  5. Martucci, A., Bassiri, N., Guglielmi, M., Armelao, L., Gross, S., and Pivin, J.C., NiO-SiO2 Sol-Gel Nanocomposite Films for Optical Gas Sensor, J. Sol-Gel Sci. Technol., 2003, vol. 26, nos. 1–3, pp. 993–996.

    CAS  Google Scholar 

  6. Shilova, O.A., Silicate Nanosized Films Prepared by the Sol-Gel Method for Use in Planar Technology for Fabricating Semiconductor Gas Sensors, Fiz. Khim. Stekla, 2005, vol. 31, no. 2, pp. 270–294 [Glass Phys. Chem. (Engl. transl.), 2005, vol. 31, no. 2, pp. 201–218].

    Google Scholar 

  7. Zhabrev, V.A., Moshnikov, V.A., Tairov, Yu.M., Fedotov, A.A., and Shilova, O.A., Zol’-gel’ tekhnologiya (Uchebnoe posobie) (Sol-Gel Technology: A Manual), St. Petersburg: St. Petersburg GETU “LETI,” 2004.

    Google Scholar 

  8. Shilova, O.A., Chepik, L.F., and Bubnov, Yu.Z., Properties of the Films Prepared from Tetraethoxysilane-Based Solutions as Functions of the Technological Aspects of Their Formation, Zh. Prikl. Khim. (St. Petersburg), 1995, vol. 68, no. 10, pp. 1608–1612.

    CAS  Google Scholar 

  9. Borisenko, A.I., Novikov, V.V., Prikhod’ko, N.E., Mitnikova, I.M., and Chepik, L.F., Tonkie neorganicheskie plenki v mikroelektronike (Thin Inorganic Films in Microelectronics), Leningrad: Nauka, 1972.

    Google Scholar 

  10. Brinker, C.J. and Scherer, G.W., Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing, San Diego: Academic, 1990.

    Google Scholar 

  11. Vorotilov, K.A., Petrovsky, V.I., Vasiljev, V.A., Sobolevsky, M.V., and Valeev, A.S., Ormosil Films: Properties and Microelectronic Applications, J. Sol-Gel Sci. Technol., 1997, vol. 8, pp. 581–584.

    Article  CAS  Google Scholar 

  12. Zuzhu Yu, Terence K.S. Wong, and Xiao Hu, Low Dielectric Constant Organosilicate Films Prepared by Sol-Gel and Templating Method, J. Sol-Gel Sci. Technol., 2004, vol. 29, pp. 56–57.

    Google Scholar 

  13. Mackenzie, J.D. and Bescher, E., Some Factor Governing the Coating of Organic Polymers by Sol-Gel Derived Hybrid Materials, J. Sol-Gel Sci. Technol., 2003, vol. 27, pp. 7–14.

    Article  CAS  Google Scholar 

  14. Sviderskii, V.A., Voronkov, M.G., Klimenko, S.V., and Klimenko, V.S., Thermal Transformations of Polymetallosiloxanes Prepared by the Sol-Gel Procedure, Zh. Prikl. Khim. (St. Petersburg), 2001, vol. 74, no. 7, pp. 1137–1141 [Russ. J. Appl. Chem. (Engl. transl.), 2001, vol. 74, no. 7, pp. 1169–1172].

    Google Scholar 

  15. Kamiya, K., Oka, A., Nasa, H., et al., Comparative Study of Structure of Silica Gels from Different Sources, J. Sol-Gel Sci. Technol., 2000, vol. 19, pp. 495–497.

    Article  CAS  Google Scholar 

  16. Battisha, J.K., Atify, H.H., and Badr, J., Structural and Photoluminescence Behavior of Nanostructure Thin Films and Bulk Silica Gel Derived Glasses, J. Sol-Gel Sci. Technol., 2002, vol. 25, pp. 5–8.

    Article  CAS  Google Scholar 

  17. Singh, A.K. and Pantono, C.G., Surface Chemistry and Structure of Silicon Oxycarbide Gels and Glasses, J. Sol-Gel Sci. Technol., 1997, vol. 8, pp. 371–376.

    Article  CAS  Google Scholar 

  18. Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy, Briggs, D. and Seah, M., Eds., New York: Wiley, 1983. Translated under the title Analiz poverkhnosti metodami Ozhe i rentgenovskoi fotoelektronnoi spektroskopii, Moscow: Mir, 1987.

    Google Scholar 

  19. Povstugar, V.I., Shakov, A.A., Mikhailov, S.S., Voronina, E.V., and Elsukov, E.P., Resolution of Complex X-ray Photoelectron Spectra Using Fast Discrete Fourier Transformation with Improved Convergence Procedure: Assessment of the Usability of the Procedure, Zh. Anal. Khim., 1998, vol. 53, no. 8, pp. 795–799 [J. Anal. Chem. (Engl. transl.), 1998, vol. 53, no. 8, pp. 697–700].

    Google Scholar 

  20. Nefedov, V.N., Rentgenoelektronnaya spektroskopiya khimicheskikh soedinenii (X-ray Photoelectron Spectroscopy of Chemical Compounds), Moscow: Khimiya, 1984.

    Google Scholar 

  21. Newton, M.D., Theoretical Probes of Bonding in the Disiloxy Group, in Structure and Bonding in Crystals, O’Keeffe, M. and Navrotsky, A., Eds., New York: Academic, 1981, vol. 1, pp. 175–193.

    Google Scholar 

  22. Liebau, F., Structural Chemistry of Silicates: Structure, Bonding, and Classification, Berlin: Springer-Verlag, 1985. Translated under the title Strukturnaya khimiya silikatov, Moscow: Mir, 1988.

    Google Scholar 

  23. Zyubin, A.S. and Dembovskii, S.A., Quantum-Chemical Simulation of the Properties of the Structural Fragments of a Continuous Disordered Network in “Tetrahedral” Glass-Formers SiO2, GeO2, GeS2, BeF2, and ZnCl2, Materialovedenie, 1999, no. 1, pp. 2–19.

  24. Beamson, G. and Briggs, D., High-Resolution XPS of Organic Polymers: The Scienta ESCA300 Database, Chichester: Wiley Interscience, 1992.

    Google Scholar 

  25. Schlogl, R. and Boehm, H.P., Influence of Crystalline Perfection and Surface Species on the X-ray Photoelectron Spectra of Natural and Synthetic Graphites, Carbon, 1983, vol. 21, pp. 345–358.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

Original Russian Text © O.M. Kanunnikova, S.S. Mikhailova, A.E. Murav’eva, O.Yu. Goncharov, O.A. Shilova, Yu.Z. Bubnov, 2006, published in Fizika i Khimiya Stekla.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kanunnikova, O.M., Mikhailova, S.S., Murav’eva, A.E. et al. Specific features of the structure of sol-gel silicate films doped with Mn and Pt. Glass Phys Chem 32, 228–233 (2006). https://doi.org/10.1134/S1087659606020167

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1087659606020167

Keywords

Navigation