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Effect of Target Erosion on Properties of Molybdenum Films

  • Inorganic Synthesis and Industrial Inorganic Chemistry
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Abstract

The influence exerted by the profile of the zone in which the target is sputtered on the structure and properties of molybdenum films produced by magnetron sputtering with the discharge stabilized in its current and power was examined. It was shown that the resulting films have a (110) texture and columnar microstructure across their thickness. The physicomechanical properties of the films (hardness, elastic-plastic characteristics) were examined. A decrease in the plasticity of the molybdenum films is observed with increasing erosion of the target. A relationship is demonstrated between the deposition parameters of a film and the rate of its anodic dissolution in an acid medium as regards the microstructure of molybdenum.

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Funding

The study was financially supported by UMNIK program of PNPPK AO, contract no. 36/0-70-D.

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Authors and Affiliations

  1. Perm Scientific-Industrial Instrument Making Company, Perm, 614990, Russia

    A. M. Minkin & D. D. Larionov

  2. Perm State National Research University, Perm, 614990, Russia

    N. A. Medvedeva

  3. Perm National Research Polytechnic University, Perm, 614990, Russia

    A. A. Ketov & Ya. I. Vaisman

Authors
  1. A. M. Minkin
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  2. N. A. Medvedeva
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  3. D. D. Larionov
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  4. A. A. Ketov
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Corresponding author

Correspondence to A. A. Ketov.

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The authors state that they have no conflict of interest to be disclosed in the present communication.

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Russian Text © The Author(s), 2019, published in Zhurnal Prikladnoi Khimii, 2019, Vol. 92, No. 10, pp. 1263–1270.

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Minkin, A.M., Medvedeva, N.A., Larionov, D.D. et al. Effect of Target Erosion on Properties of Molybdenum Films. Russ J Appl Chem 92, 1359–1365 (2019). https://doi.org/10.1134/S1070427219100057

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  • DOI: https://doi.org/10.1134/S1070427219100057

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