Abstract
Porous silicon materials, macro- and mesoporous silicon, obtained by electrochemical anodic etching of n- and p-Si were studied by differential thermal analysis at a steady temperature rise and under isothermal conditions in nitrogen atmosphere and in air. The method was used to estimate the presence and amount of phases of surface volatile compounds. The possibility was studied to perform a comparative estimate of the specific surface area of different types of porous silicon from data on the surface oxidation kinetics determined by the dynamic differential thermal analysis in air.
Similar content being viewed by others
References
Nechitaylov, A.A., and Astrova, E.V., Al’ternativnaya Energetika i Ekologiya, 2007, no. 2, pp. 66–71.
Physicochemical Phenomena in Thin Films and at Solid Surfaces. Thin Films and Nanostructures, Trakhtenberg, L.I., Sheng H.L., and Ilegbusi, J., Eds., New York: Acad. Press, vol. 34, 2007.
Ogata, Y.H., Yoshimi, N., Yasuda, R., et al., J. Appl. Phys., 2001, vol. 90, no. 12, pp. 6487–6492.
Lehmann, V., Electrochemistry of Silicon, Weinheim: Wiley, 2002.
Deal, B.E., and Grove, A.S., J. Appl. Phys., 1965, vol. 36, no. 12, pp. 3770–3778.
Zhang, X.G., Electrochemistry of Silicon and Its Oxide, New York: Kluwer, 2004.
Starkov, V.V., Abstracts of Papers, VII Mezhdunarodnaya nauchnaya konferentsiya “Khimiya tverdogo tela i sovremennye mikro- i nanotekhnologii” (VII Intern. Sci. Conf. “Solid-State Chemistry and Up-To-Day Micro- and Nanotechnologies), Moscow, September 17–22, 2007, p. 271.
Author information
Authors and Affiliations
Additional information
Original Russian Text © A.A. Nechitaylov, N.V. Glebova, 2009, published in Zhurnal Prikladnoi Khimii, 2009, Vol. 82, No. 11, pp. 1779–1784.
Rights and permissions
About this article
Cite this article
Nechitaylov, A.A., Glebova, N.V. Differential thermal analysis of porous silicon. Russ J Appl Chem 82, 1928–1933 (2009). https://doi.org/10.1134/S1070427209110056
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1070427209110056