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Kinetic rules of precipitation of thin films of titanium dioxide from the gas phase containing titanium tetraisopropylate

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Abstract

Precipitation of titanium dioxide layers from the gas phase in the reaction system containing titanium tetraisopropylate and oxygen at the total pressure 1 kPa is studied. It is shown that in the range of 300–500°C the precipitation proceeds in the kinetic regime and is accompanied by the formation of layers of monotonous thickness containing nanocrystalline phases of anatase and rutile. In the temperature range 300–350°C the activation energy value was 92.7 kJ mol−1, and at higher temperatures (up to 500°C) it decreased to 17.5 kJ mol−1. The increase in the precipitation temperature caused the increase in relative amount of rutile in the precipitated layers.

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Authors and Affiliations

  1. St. Petersburg State Polytechnical University, ul. Politekhnicheskaya 29, St. Petersburg, 195251, Russia

    M. V. Baryshnikova, S. E. Aleksandrov, L. A. Filatov & A. B. Berberov

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  1. M. V. Baryshnikova
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  2. S. E. Aleksandrov
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  3. L. A. Filatov
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  4. A. B. Berberov
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Correspondence to M. V. Baryshnikova.

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Original Russian Text © M.V. Baryshnikova, S.E. Aleksandrov, L.A. Filatov, A.B. Berberov, 2013, published in Zhurnal Obshchei Khimii, 2013, Vol. 83, No. 8, pp. 1367–1371.

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Baryshnikova, M.V., Aleksandrov, S.E., Filatov, L.A. et al. Kinetic rules of precipitation of thin films of titanium dioxide from the gas phase containing titanium tetraisopropylate. Russ J Gen Chem 83, 1596–1600 (2013). https://doi.org/10.1134/S1070363213080215

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  • DOI: https://doi.org/10.1134/S1070363213080215

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