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Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target

  • PHYSICAL PROCESSES IN ELECTRON DEVICES
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Abstract

A group of high-energy positive O+ ions in a plasma flow from a high-current pulsed magnetron discharge with a hot target in an Ar/O2 gas mixture. The mechanism of occurrence of accelerated O+ ions is the conversion of negative ions accelerated in the cathode layer O– → O+ in the processes of charge exchange or ionization by electron impact.

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Funding

This study was supported by the Russian Science Foundation, project no. 18-79-10242.

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Authors and Affiliations

  1. Kotelnikov Institute of Radioengineering and Electronics, Fryazino Branch, Russian Academy of Sciences, 141190, Fryazino, Moscow oblast, Russia

    D. V. Kolodko

  2. National Research Nuclear University Moscow Engineering Physics Institute, 115409, Moscow, Russia

    D. V. Kolodko, A. V. Kaziev, D. G. Ageichenkov & V. Yu. Lisenkov

  3. Lebedev Physical Institute, Russian Academy of Sciences, 119991, Moscow, Russia

    D. V. Kolodko

Authors
  1. D. V. Kolodko
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  2. A. V. Kaziev
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  3. D. G. Ageichenkov
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  4. V. Yu. Lisenkov
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Corresponding author

Correspondence to D. V. Kolodko.

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The authors of the declare that they have no conflicts of interest.

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The work was awarded a prize at the 19th Ivan Anisimkin Young Scientists Competition.

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Kolodko, D.V., Kaziev, A.V., Ageichenkov, D.G. et al. Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target. J. Commun. Technol. Electron. 68, 1249–1251 (2023). https://doi.org/10.1134/S1064226923100078

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  • DOI: https://doi.org/10.1134/S1064226923100078

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