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Investigation of the Influence of the Quality of Surfaces of Optical Substrates on the Performance Characteristics of Thin-Film Coatings

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Abstract

The main results of the operation of a modern technological system for the deposition and control of optical coatings on substrates with different degrees of roughness are analyzed according to the data of recording the characteristics of the scattered laser radiation indicatrix. The features of the approximations of the differential scattering method used to estimate the statistical parameters of the profiles of optical substrates are considered: the spectral density of the correlation function (SDCF) and the effective standard deviation (root-mean-square or RMS). The main characteristics of the scattered laser radiation from the surfaces of optical parts with different levels of roughness are presented. The results of experimental studies devoted to the influence of the quality of the surfaces of optical substrates on the performance characteristics of various film-forming materials of optical coatings applied with and without ion assistance are discussed. Based on the experiment carried out, the possibilities of reducing light scattering and leveling the irregularities of the surfaces of substrates with different degrees of roughness are investigated.

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REFERENCES

  1. O. F. Prosovsky, A. Yu. Budnev, D. G. Denisov, N. V. Baryshnikov, and Yu. O. Prosovsky, “Modern system of direct optical broadband control of the thickness of deposited optical coatings,” Svetotekhnika (Lighting Engineering), No. 4, 51 (2020).

  2. M. Lequime, S. Nadji, D. Stojcevski, C. Koc, C. Grezes-Besset, and J. Lumeau, “Determination of the optical constants of a dielectric layer by processing in situ spectral transmittance measurements along the time dimension,” Appl. Opt. 56, 181 (2017).

    Article  Google Scholar 

  3. S. L. Nadji, M. Lequime, T. Begou, C. Koc, C. Grezes-Besset, and J. Lumeau, “Use of a broadband monitoring system for the determination of the optical constants of a dielectric bilayer,” Appl. Opt. 57, 877 (2018).

    Article  Google Scholar 

  4. F. G. Bass and I. I. Fuchs, Scattering of waves on a statistical uneven surface (Nauka, Moscow, 1972).

    Google Scholar 

  5. D. G. Denisov, “Measurement of the roughness parameters of ground and polished optical surfaces using high-precision methods of laser interferometry,” Adv. in Appl. Phys. 5 (4), 393 (2017).

    Google Scholar 

  6. J. M. Elson, “Theory of light scattering from a rough surface with an inhomogeneous dielectric permittivity,” The American Phys. Soc. 30, 5460 (1984).

    Google Scholar 

  7. N. V. Baryshnikov, D. G. Denisov, V. E. Karasik, E. V. Krasnova, V. M. Orlov, and A. B. Morozov, “Analysis of the capabilities of the differential scattering method in the problems of high-precision control of surface inhomogeneities of subnanometer level profiles of large optical and laser parts,” in Lasers in Science, Technology, Medicine. Collection of Scientific Papers (MNTORES im. A. S. Popova, Moscow, 2016), pp. 113–119 [in Russian].

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Authors and Affiliations

  1. Bauman Moscow Technical University, 105005, Moscow, Russia

    D. G. Denisov & Yu. O. Prosovskii

  2. Romashin Obninsk Research and Production Enterprise Technology, 249031, Obninsk, Kaluga oblast, Russia

    O. F. Prosovskii & Yu. O. Prosovskii

Authors
  1. D. G. Denisov
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  2. O. F. Prosovskii
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  3. Yu. O. Prosovskii
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Correspondence to D. G. Denisov.

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Denisov, D.G., Prosovskii, O.F. & Prosovskii, Y.O. Investigation of the Influence of the Quality of Surfaces of Optical Substrates on the Performance Characteristics of Thin-Film Coatings. J. Commun. Technol. Electron. 68, 1053–1060 (2023). https://doi.org/10.1134/S1064226923090061

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  • DOI: https://doi.org/10.1134/S1064226923090061

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