Skip to main content
SpringerLink
Log in

Microstructuring of the Surface of High-Resistivity Single-Crystalline Silicon by Chemical Etching

  • Published:
Journal of Communications Technology and Electronics Aims and scope Submit manuscript

Abstract

The influence of various etching processes on the single-crystalline (100) silicon surface is studied. It is demonstrated that microstructuring of the surface of high-resistivity single-crystalline silicon in alkaline solutions is better performed using electrolytic methods at temperatures no lower than 80°C. Etch patterns with better-defined side faces are formed by anisotropic etching with the addition of hydrogen peroxide.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.

Similar content being viewed by others

REFERENCES

  1. S. A. Kozin, A. V. Fedulov, V. E. Pautkin, and I. N. Barinov, Kompon. & Tekhnol., No. 1, 24 (2010).

  2. A. A. Papko, M. A. Kalinin, and V. V. Alekseeva, in Proc. VIII Sci.-Tech. Conf. on Microtechnologies in Space, Moscow, Oct. 6−7, 2010 (RKS, Moscow, 2010), p. 38.

  3. A. V. Blinov, S. A. Kozin, A. V. Fedulov, I. G. Akimov, and V. E. Pautkin, Mir Izmer., No. 1, 49 (2008).

  4. I. A. Averin and V. E. Pautkin, Tekhn. Nauki. Elektron., Izmerit. & Radio Tekhnika, No. 2 (30), 24 (2014).

    Google Scholar 

  5. Kurt E. Petersen, Proc. IEEE 70, 420 (1982).

    Article  Google Scholar 

  6. USSR Inventor’s Certificate No. 557434 (1977).

  7. Seidel et al., J. Electrochem. Soc. 137, 3612 (1990).

    Article  Google Scholar 

  8. R. A. Lidin, V. A. Molochko, and L. L. Andreeva, Chemical Properties of Inorganic Substances, Ed. by R. A. Lidin (Khimiya, Moscow, 1996) [in Russian].

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. AO NPO Orion, 111538, Moscow, Russia

    A. S. Kashuba, E. V. Permikina, S. V. Golovin, M. R. Lakmanova & A. V. Pogozheva

Authors
  1. A. S. Kashuba
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. V. Permikina
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. S. V. Golovin
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. R. Lakmanova
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. V. Pogozheva
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. S. Kashuba.

Additional information

Translated by D. Safin

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Kashuba, A.S., Permikina, E.V., Golovin, S.V. et al. Microstructuring of the Surface of High-Resistivity Single-Crystalline Silicon by Chemical Etching. J. Commun. Technol. Electron. 64, 1030–1033 (2019). https://doi.org/10.1134/S1064226919090109

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1064226919090109

Keywords:

Search

Navigation