Abstract
I–V characteristics and spectral photosensitivities of photodiodes based on epitaxially grown hydrides of metal-organic compounds (MOC-hydride epitaxy) of epitaxial structures with the In0.67Ga0.33As absorbing layer doped with Zn on the InP substrates are studied. The photodiodes are fabricated using the mesatechnology. The long-wavelength boundary of the spectral photosensitivity of diodes measured at half-maximum is 2.06 μm at room temperature. Photosensitivity spectra are studied in a temperature interval of 230–300 K.
Similar content being viewed by others
REFERENCES
I. D. Burlakov, L. Ya. Grinchenko, A. I. Dirochka, and N. B. Zaletaev, Usp. Prikl. Fiz. 2, 131 (2014).
A. I. Dirochka and L. N. Kurbatov, Photoelectronics. Basic Lectures on Electronics, Vol. 2: Solid-State Electronics (Tekhnosfera, Moscow, 2009).
Per G. Gloersen, J. Vac. Sci. Technol. 12, 28 (1975).
J. K. Kim, M. J. Cich, G. A. Keeler, et al., Appl. Phys. Lett. 95, 031112 (2009).
Adachi Sadao, Properties of Semiconductor Alloys: Group-IV, III–V and II–VI Semiconductors (Wiley, 2009).
G. F. Ivanovskii and V. I. Petrov, Ion-Plasma Processing of Materials (Radio i svyaz', Moscow, 1986).
M. V. Sednev, I. D. Burlakov, and K.O. Boltar’, “Method for assembling of a photodetector,” RF Patent No. 2308787, Byull. Izobret., No. 29 (20.10.2007).
M. V. Sednev, E. N. Zubkova, Yu. P. Sharonov, Usp. Prikl. Fiz. 1, 350 (2013).
K. O. Boltar’, M. V. Sedenev, Yu. P. Sharonov, et al., “Method for fabrication of a multielement photodetector based on the InGaAs/InP epitaxial structures,” RF Patent No. 2530458, Byull. Izobret, No. 28 (10.10.2007).
K. V. Shalimova, Semiconductor Physics (Energiya, Moscow, 1976).
D. Sheela, Nandita Das Gupta, Semicond. Sci. & Technol. 23, 035018 (2008).
M. V. Sednev, K. O. Boltar’, N. A. Irodov, and S. S. Demidov, Prikl. Fiz., No. 3, 73 (2015).
Author information
Authors and Affiliations
Corresponding authors
Additional information
Translated by A. Chikishev
Rights and permissions
About this article
Cite this article
Boltar, K.O., Irodov, N.A., Sednev, M.V. et al. Study of Photodiodes Based on the InGaAs Structure with a Boundary Wavelength of 2.06 μm. J. Commun. Technol. Electron. 64, 283–285 (2019). https://doi.org/10.1134/S1064226919030021
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1064226919030021