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Device for nanoobject manipulation based on two-layer composite with shape memory

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Abstract

A device for gripping of microand nanoobjects (nanotweezers) with a working body made of bimetal composite (fast-quenched Ti2NiCu alloy with shape memory and platinum layer) is developed and studied. A method for manufacturing of the composite material using local ion etching and ion-stimulated deposition from gas phase is proposed. A structure of nanotweezers based on such a composite and experiments on gripping and displacement of submicron objects are presented.

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Authors and Affiliations

  1. National University of Science and Technology MISiS, Leninskii pr. 4, Moscow, 119991, Russia

    V. A. Dikan, D. I. Zakharov & A. V. Irzhak

  2. Kotel’nikov Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Mokhovaya ul. 11, str. 7, Moscow, 125009, Russia

    A. V. Mashirov, P. V. Mazaev, A. M. Zhikharev, V. S. Kalashnikov, V. V. Koledov, S. V. von Gratovski & V. G. Shavrov

  3. National Research Nuclear University MEPhI, Kashirskoe sh. 31, Moscow, 115409, Russia

    N. N. Sitnikov & A. V. Shelyakov

  4. Institute of Microelectronic Technology and Ultrapure Materials, Russian Academy of Sciences, ul. Akademika Osip’yana 6, Chernogolovka, Moscow oblast, 142432, Russia

    A. V. Irzhak

Authors
  1. V. A. Dikan
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  2. A. V. Mashirov
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  3. D. I. Zakharov
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  4. P. V. Mazaev
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  5. A. M. Zhikharev
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  6. V. S. Kalashnikov
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  7. V. V. Koledov
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  8. S. V. von Gratovski
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  9. N. N. Sitnikov
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  10. A. V. Irzhak
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  11. A. V. Shelyakov
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  12. V. G. Shavrov
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Corresponding author

Correspondence to V. V. Koledov.

Additional information

Original Russian Text © V.A. Dikan, A.V. Mashirov, D.I. Zakharov, P.V. Mazaev, A.M. Zhikharev, V.S. Kalashnikov, V.V. Koledov, S.V. von Gratovski, N.N. Sitnikov, A.V. Irzhak, A.V. Shelyakov, V.G. Shavrov, 2016, published in Radiotekhnika i Elektronika, 2016, Vol. 61, No. 3, pp. 293–302.

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Dikan, V.A., Mashirov, A.V., Zakharov, D.I. et al. Device for nanoobject manipulation based on two-layer composite with shape memory. J. Commun. Technol. Electron. 61, 302–310 (2016). https://doi.org/10.1134/S1064226916030086

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  • DOI: https://doi.org/10.1134/S1064226916030086

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