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Transformation of GaAs surface during the vacuum deposition of Au films studied with surface acoustic waves

  • Physical Processes in Electron Devices
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Abstract

Surface acoustic waves are used to study the transformation of the surface of a high-resistance (semi-insulating) gallium arsenide in situ in the course of the thermal deposition of gold in vacuum. It is demonstrated that the surface modifications that involve the formation of the Au-Ga liquid phase and solid solutions based on Au3Ga, Au7Ga2, etc. result in variations in the parameters (amplitude and phase) of the transmitted acoustic wave and can be identified using such variations.

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Authors
  1. T. A. Bryantseva
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  2. V. E. Lyubchenko
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  3. D. V. Lyubchenko
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  4. I. A. Markov
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  5. E. M. Tolmachev
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Additional information

Original Russian Text © T.A. Bryantseva, V.E. Lyubchenko, D.V. Lyubchenko, I.A. Markov, E.M. Tolmachev, 2009, published in Radiotekhnika i Elektronika, 2009, Vol. 54, No. 5, pp. 621–624.

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Bryantseva, T.A., Lyubchenko, V.E., Lyubchenko, D.V. et al. Transformation of GaAs surface during the vacuum deposition of Au films studied with surface acoustic waves. J. Commun. Technol. Electron. 54, 592–595 (2009). https://doi.org/10.1134/S1064226909050143

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  • DOI: https://doi.org/10.1134/S1064226909050143

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