Skip to main content
SpringerLink
Log in

Subwave Textured Surfaces for the Radiation Coupling from the Waveguide

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

The paper presents a procedure for creating on GaAs(100) substrates textured surfaces by ion-beam etching with a focused beam. The possibility of flexibly controlling the shape and profile of the formed submicron elements of textured media is shown; this will later allow formation of textured surfaces of almost any complexity for realizing the surface radiation coupling from the waveguide. Original lithographic masks were developed, and 3D lithography was accomplished. The obtained lithographic patterns were controlled by the methods of optical, electron and atomic force microscopy.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.

REFERENCES

  1. D. Popa, F. Udrea, Sensors, 19, 2076 (2019). https://doi.org/10.3390/s19092076

    Article  ADS  CAS  PubMed  PubMed Central  Google Scholar 

  2. R. Szedlak, C. Schwarzer, T. Zederbauer, H. Detz, A. M. Andrews, W. Schrenk, W. Strasser, Appl. Phys. Lett., 104, 151105 (2014). https://doi.org/10.1063/1.4871520

    Article  ADS  CAS  Google Scholar 

  3. R. Szedlak, C. Schwarzer, T. Zederbauer, H. Detz, A.M. Andrews, W. Schrenk, W. Strasser, Opt. Express, 22, 15829 (2014). https://doi.org/10.1364/OE.22.015829

    Article  ADS  CAS  PubMed  Google Scholar 

  4. J. Semmel, L. Nahle, S. Ho fling, A. Forchel, Appl. Phys. Lett., 91, 071104 (2007). https://doi.org/10.1063/1.2771054

    Article  ADS  CAS  Google Scholar 

  5. A. Deinega, I. Valuev, B. Potapkin, Yu. Lozovik, J. Opt. Soc. Am. A, 28, 770 (2011). https://doi.org/10.1364/JOSAA.28.000770

    Article  ADS  Google Scholar 

  6. J. A. Dobrowolski, D. Poitras, P. Ma, H. Vakil, M. Acree, Appl. Opt., 41, 3075 (2002). https://doi.org/10.1364/AO.41.003075

    Article  ADS  CAS  PubMed  Google Scholar 

  7. J. Gallant, M. A. Kaliteevski, D. Wood, M. C. Petty, R. A. Abram, S. Brand, G. P. Swift, D. A. Zeze, J. M. Chamberlain, Appl. Phys. Lett., 91, 161115 (2007). https://doi.org/10.1063/1.2800381

    Article  ADS  CAS  Google Scholar 

Download references

Funding

The study was supported by the Russian Scientific Foundation (project No. 21-12-00304).

Author information

Authors and Affiliations

  1. Ioffe Institute, St. Petersburg, Russia

    G. V. Voznyuk, I. N. Grigorenko, M. I. Mitrofanov, V. V. Nikolaev & V. P. Evtikhiev

  2. ITMO University, St. Petersburg, Russia

    G. V. Voznyuk, M. I. Mitrofanov & V. P. Evtikhiev

  3. St. Petersburg State Electrotechnical University “LETI”, St. Petersburg, Russia

    I. N. Grigorenko

  4. Submicron Heterostructures for Microelectronics, Research & Engineering Center, RAS, St. Petersburg, Russia

    M. I. Mitrofanov

Authors
  1. G. V. Voznyuk
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. I. N. Grigorenko
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. I. Mitrofanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. V. Nikolaev
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. V. P. Evtikhiev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to G. V. Voznyuk.

Ethics declarations

The authors of this work declare that they have no conflicts of interest.

Additional information

Publisher’s Note.

Pleiades Publishing remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Voznyuk, G.V., Grigorenko, I.N., Mitrofanov, M.I. et al. Subwave Textured Surfaces for the Radiation Coupling from the Waveguide. Tech. Phys. Lett. 49 (Suppl 3), S299–S301 (2023). https://doi.org/10.1134/S1063785023010339

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785023010339

Keywords:

Search

Navigation