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Study on Optical and Photocatalytic Properties of Titanium Oxide Thin Films with Various Oxidation Degrees

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Abstract

The article presents the results of studies of the optical and photocatalytic properties of titanium oxide thin films deposited by cathodic arc deposition in an oxygen-containing atmosphere. It has been shown that thin films with various oxidation degrees are deposited depending on the oxygen flow rate into the operating chamber. Study of the obtained films has shown that the films obtained in the transition mode between the deposition of Ti metal films and TiO2 dielectric films have the maximum photocatalytic activity. This deposition mode is observed when the oxygen flow rate into the operating chamber is from 9 to 12 cm3/min.

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Funding

The study was carried out by the staff of the scientific laboratory of integrated optics and radio photonics of ToMsk State University of Control Systems and Radioelectronics with the financial support of the Ministry of Science and Higher Education of the Russian Federation under agreement no. 075-03-2020-237/1 dated March 5, 2020 (internal project no. FEWM-2020-0040). The study of the photocatalytic properties of titanium oxide films was carried out according to the project of the fundamental Research of the Russian Academy of Sciences no. 122041500075-5. The experimental results were obtained using the equipment of the research equipment sharing center “Impulse” (registration number 200568).

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Authors and Affiliations

  1. Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia

    S. E. Ruchkin, Yu. S. Zhidik, A. A. Runts & E. D. Goncharova

  2. Tomsk Polytechnic University, Tomsk, Russia

    S. E. Ruchkin, Yu. N. Yurjev, A. A. Runts & A. V. Yurjeva

  3. V.E. Zuev Institute of Atmospheric Optics SB RAS, Tomsk, Russia

    Yu. S. Zhidik & Yu. N. Yurjev

Authors
  1. S. E. Ruchkin
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  2. Yu. S. Zhidik
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  3. Yu. N. Yurjev
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  4. A. A. Runts
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  5. E. D. Goncharova
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  6. A. V. Yurjeva
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Corresponding author

Correspondence to Yu. S. Zhidik.

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The authors declare that they have no conflicts of interest.

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Ruchkin, S.E., Zhidik, Y.S., Yurjev, Y.N. et al. Study on Optical and Photocatalytic Properties of Titanium Oxide Thin Films with Various Oxidation Degrees. Tech. Phys. Lett. 48, 297–300 (2022). https://doi.org/10.1134/S1063785022100054

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  • DOI: https://doi.org/10.1134/S1063785022100054

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