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Mechanical Properties of Epilayers of Metastable α- and ε-Ga2O3 Phases Studied by Nanoindentation

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Abstract

The resistance to deformation and crack formation in epitaxial layers of metastable α- and ε(κ)‑Ga2O3 polymorphs grown on sapphire substrates has been studied by nanoindentation techniques. The epilayers of α-Ga2O3 (0001) and ε(κ)-Ga2O3 (001) polymorphs are characterized by hardness H (18.7 and 17.5 GPa) and Young’s modulus E (283.4 and 256.1 GPa), respectively. It is established that the critical stress intensity factor (characterizing the cracking resistance) for ε(κ)-Ga2O3 is K1c ∼ 0.67 MPa m1/2 and that for α-Ga2O3 is K1c ∼ 0.70 MPa m1/2.

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ACKNOWLEDGMENTS

This work was performed with the use of a NanoTest microhardness meter (Micro Materials Ltd.) at the Unique Facility Physics, Chemistry, and Mechanics of Crystals and Thin Films (Institute of Problems of Mechanical Engineering, St. Petersburg). The authors are also grateful to Perfect Crystals LLC (St. Petersburg) for kindly providing samples for this study.

Funding

L.I. Guzilova, P.N. Butenko, A.V. Chikiryaka, A.I. Pechnikov, and V.I. Nikolaev carried out their part of the work in the framework of the project “Fundamental Problems of Physics and Chemistry of Nanostructured and Nanocomposite Materials and Device Structures: Physical Properties of Single Crystalline and Disordered Materials,” state order no. 0040-2014-0007. A.S. Grashchenko performed his part of the work in the framework of state orders to the Institute of Problems of Mechanical Engineering, project no. АААА-А18-118012790011-3.

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Authors and Affiliations

  1. Ioffe Physical Technical Institute, 194021, St. Petersburg, Russia

    L. I. Guzilova, P. N. Butenko, A. V. Chikiryaka, A. I. Pechnikov & V. I. Nikolaev

  2. Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, 199178, St. Petersburg, Russia

    A. S. Grashchenko

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  1. L. I. Guzilova
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  2. A. S. Grashchenko
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  3. P. N. Butenko
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  4. A. V. Chikiryaka
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  5. A. I. Pechnikov
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  6. V. I. Nikolaev
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Correspondence to L. I. Guzilova.

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Translated by P. Pozdeev

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Guzilova, L.I., Grashchenko, A.S., Butenko, P.N. et al. Mechanical Properties of Epilayers of Metastable α- and ε-Ga2O3 Phases Studied by Nanoindentation. Tech. Phys. Lett. 47, 709–713 (2021). https://doi.org/10.1134/S106378502107021X

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