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Plasmachemical and Wet Etching in the Postgrowth Technology of Solar Cells Based on the GaInP/GaInAs/Ge Heterostructure

Abstract—Studies have been carried out and a technology has been developed for the formation of a separating mesa structure in fabrication of multi-junction solar cells based on the GaInP/GaInAs/Ge heterostructure. Methods for etching of the heterostructure layers have been studied: wet chemical etching in compositions based on HBr, K2Cr2O7, and H2O and the plasmachemical etching in a flow of the BCl3 working gas. A comparative analysis of the etching methods was made. Protective masks based on a photoresist layer and TiOx/SiO2 were developed. Multi-junction solar cells with low leakage current (less than 10–7 A at a voltage of 0.5–1 V) were fabricated.

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REFERENCES

  1. 1

    M. A. Green, E. D. Dunlop, D. H. Levi, J. Hohl-Ebinger, M. Yoshita, and A. W. Y. Ho-Baillie, Progr. Photovolt.: Res. Appl. 27, 565 (2019). https://doi.org/10.1002/pip.3171

    Article  Google Scholar 

  2. 2

    Zh. I. Alferov, V. M. Andreev, and V. D. Rumyantsev, in Concentrator Photovoltaics, Ed. by A. Luque and V. Andreev, Vol. 130 of Springer Series in Optical Sciences (Springer, Berlin, Heidelberg, 2007), p. 25. https://doi.org/10.1007/978-3-540-68798-6_2

  3. 3

    M. E. Levinshtein, Semiconductor Technology (Wiley-Interscience, USA, 1997).

    Google Scholar 

  4. 4

    A. V. Malevskaya, N. D. Il’inskaya, and V. M. Andreev, Tech. Phys. Lett. 45, 1230 (2019). https://doi.org/10.1134/S1063785019120241

    ADS  Article  Google Scholar 

  5. 5

    E. V. Kontrosh, A. V. Malevskaya, N. M. Lebedeva, E. A. Grebenshchikova, L. V. Kontrosh, N. D. Il’inskaya, and V. S. Kalinovskii, Al’tern. Energet. Ekol. 19 (183), 70 (2015). https://doi.org/10.15518/isjaee.2015.19.009

    Article  Google Scholar 

  6. 6

    D. I. Solovetskii, in Low Temperature Plasma Encyclopedia (Nauka, Moscow, 2000), Vol. 3 [in Russian].

    Google Scholar 

  7. 7

    M. de Lafontaine, E. Pargon, C. Petit-Etienne, G. Gay, A. Jaouad, M.-J. Gour, M. Volatier, S. Fafard, V. Aimez, and M. Darnon, Sol. Energy Mater. Sol. Cells 195, 49 (2019). https://doi.org/10.1016/j.solmat.2019.01.048

    Article  Google Scholar 

  8. 8

    F. F. Chen and J. P. Chang, Lecture Notes on Principles of Plasma Processing (Kluwer/Plenum, New York, 2002).

    Google Scholar 

  9. 9

    T. V. Svistova, Beam and Plasma Technologies (VGTU, Voronezh, 2016) [in Russian].

    Google Scholar 

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Correspondence to A. V. Malevskaya.

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Translated by M. Tagirdzhanov

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Malevskaya, A.V., Zadiranov, Y.M., Malevskii, D.A. et al. Plasmachemical and Wet Etching in the Postgrowth Technology of Solar Cells Based on the GaInP/GaInAs/Ge Heterostructure. Tech. Phys. Lett. 47, 114–117 (2021). https://doi.org/10.1134/S1063785021020103

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Keywords:

  • multi-junction solar cells
  • heterostructure
  • etching
  • mesa structure.