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Influence of Target Temperature on the Formation of a Nanorelief under Irradiation with Gas Cluster Ions

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Abstract

A nanorelief forming on a copper surface under oblique irradiation with cluster ions has been examined at different irradiation doses and target temperatures. This nanorelief has been found to evolve into an ordered undulating structure. It has been demonstrated that the initial roughness is smoothed out at higher target temperatures. The mechanisms of formation of the surface topography have been identified, and their efficiency has been determined.

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REFERENCES

  1. A. A. Shemukhin, Yu. V. Balakshin, V. S. Chernysh, S. A. Golubkov, N. N. Egorov, and A. I. Sidorov, Semiconductors 48, 517 (2014). https://doi.org/10.1134/S1063782614040265

    Article  ADS  Google Scholar 

  2. I. Yamada, J. Matsuo, N. Toyoda, and A. Kirkpatrick, Mater. Sci. Eng. R 34, 231 (2001). https://doi.org/10.1016/S0927-796X(01)00034-1

    Article  Google Scholar 

  3. A. E. Ieshkin, D. S. Kireev, Yu. A. Ermakov, A. S. Trifonov, D. E. Presnov, A. V. Garshev, Yu. V. Anufriev, I. G. Prokhorova, V. A. Krupenin, and V. S. Chernysh, Nucl. Instrum. Methods Phys. Res., Sect. B 421, 27 (2018). https://doi.org/10.1016/j.nimb.2018.02.019

    Article  Google Scholar 

  4. N. G. Korobeishchikov, I. Nikolaev, and M. A. Roenko, Tech. Phys. Lett. 45, 274 (2019). https://doi.org/10.1134/S1063785019030295

    Article  ADS  Google Scholar 

  5. K. Sumie, N. Toyoda, and I. Yamada, Nucl. Instrum. Methods Phys. Res., Sect. B 307, 290 (2013). https://doi.org/10.1016/j.nimb.2013.01.087

    Article  Google Scholar 

  6. O. Lozano, Q. Y. Chen, B. P. Tilakaratne, H. W. Seo, X. M. Wang, P. V. Wadekar, P. V. Chinta, L. W. Tu, N. J. Ho, D. Wijesundera, and W. K. Chu, AIP Adv. 3, 062107 (2013). https://doi.org/10.1063/1.4811171

    Article  ADS  Google Scholar 

  7. B. P. Tilakaratne, Q. Y. Chen, and W. K. Chu, Materials 10, 1056 (2017). https://doi.org/10.3390/ma10091056

    Article  ADS  Google Scholar 

  8. N. Toyoda, B. Tilakaratne, I. Saleem, and W-K. Chu, Appl. Phys. Rev. 6, 020901 (2019). https://doi.org/10.1063/1.5030500

    Article  ADS  Google Scholar 

  9. D. S. Kireev, A. V. Danilov, A. E. Ieshkin, and V. S. Chernysh, Vestn. RGRTU, No. 66, 40 (2018). https://doi.org/10.21667/1995-4565-2018-66-4-2-40-48

  10. V. N. Popok, Rev. Adv. Mater. Sci. 38, 7 (2014).

    Google Scholar 

  11. M. P. Seah, J. Phys. Chem. C 117, 12622 (2013). https://doi.org/10.1021/jp402684c

    Article  Google Scholar 

  12. H. Kitani, N. Toyoda, J. Matsuo, and I. Yamada, Nucl. Instrum. Methods Phys. Res., Sect. B 121, 489 (1997). https://doi.org/10.1016/S0168-583X(96)00556-3

    Article  Google Scholar 

  13. A. E. Ieshkin, D. S. Kireev, A. A. Tatarintsev, and V. S. Chernysh, Nucl. Instrum. Methods Phys. Res., Sect. B 460, 165 (2019). https://doi.org/10.1016/j.nimb.2019.03.054

    Article  Google Scholar 

  14. G. N. Elmanov, A. G. Zaluzhnyi, V. I. Skrytnyi, E. A. Smirnov, and V. N. Yal’tsev, Physical Materials Science, Vol. 1: Solid State Physics (MIFI, Moscow, 2007) [in Russian].

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ACKNOWLEDGMENTS

The authors wish to thank A.A. Tatarintsev and A.S. Trifonov for their help in microscopic studies of the samples.

Funding

This study was supported by the Russian Foundation for Basic Research, project no. 18-32-20193.

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Authors and Affiliations

  1. Moscow State University, 119991, Moscow, Russia

    D. S. Kireev & A. E. Ieshkin

  2. Skobeltsyn Institute of Nuclear Physics, Moscow State University, 119991, Moscow, Russia

    A. A. Shemukhin

Authors
  1. D. S. Kireev
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  2. A. E. Ieshkin
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  3. A. A. Shemukhin
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Corresponding author

Correspondence to D. S. Kireev.

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The authors declare that they have no conflict of interest.

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Translated by D. Safin

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Kireev, D.S., Ieshkin, A.E. & Shemukhin, A.A. Influence of Target Temperature on the Formation of a Nanorelief under Irradiation with Gas Cluster Ions. Tech. Phys. Lett. 46, 409–412 (2020). https://doi.org/10.1134/S1063785020050065

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