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Spark Plasma Sintering of SmS-Based Ceramic Targets for the Magnetron Sputtering

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Abstract

The results of studying the electric-spark plasma sintering of samarium monosulfide ceramics are presented. The dependence of the microstructure and phase composition of ceramics on the temperature of spark plasma sintering is studied on the basis of the data of scanning electron microscopy, energy dispersion X-ray microanalysis, and powder X-ray diffraction of synthesized samples. It is shown that a dense, nonporous ceramics, the phase composition of which is close to the composition of the initial powder, is formed at a sintering temperature of 1200°C.

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ACKNOWLEDGMENTS

The use of the equipment of the Analytical Center for Collective Use of the Dagestan Scientific Center of the Russian Academy of Sciences and the Center for Collective Use Structural Diagnostics of Materials of the Institute of Crystallography of the Federal Research Center Crystallography and Photonics of the Russian Academy of Sciences is gratefully acknowledged.

Funding

This work was supported by the Ministry of Science and Higher Education of the Russian Federation in the framework of state assignments performing by the Institute of Physics of the Dagestan Scientific Center of the Russian Academy of Sciences and the Federal Research Center “Crystallography and Photonics” of the Russian Academy of Sciences.

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Correspondence to A. Sh. Asvarov.

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Translated by L. Mosina

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Akhmedov, A.K., Abduev, A.K., Asvarov, A.S. et al. Spark Plasma Sintering of SmS-Based Ceramic Targets for the Magnetron Sputtering. Tech. Phys. Lett. 45, 773–776 (2019). https://doi.org/10.1134/S1063785019080030

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  • DOI: https://doi.org/10.1134/S1063785019080030

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