Skip to main content
SpringerLink
Log in

The Influence of Nitrogen Partial Pressure on the Composition, Microstructure, and Mechanical Characteristics of Ti1 –x–yAlxTаyN Coatings Obtained by Reactive Magnetron Sputtering

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

The evolution of the elemental composition, surface morphology, microstructure, and mechanical properties of Ti1 –x–yAlxTаyN coatings deposited by reactive magnetron sputtering has been studied when the ratio of the partial pressure of nitrogen to the total pressure of reactive gas mixture was increased from 0.1 to 0.5. It is established that most significant changes in the relative content of Ti, Al, and Ta in as-deposited coatings take place when this ratio is varied from 0.1 to 0.3. The observed changes in the elemental composition of Ti1 –x–yAlxTаyN coatings do not influence their phase composition, but lead to changes in the microstructure and mechanical characteristics.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.

Similar content being viewed by others

REFERENCES

  1. A. R. Shugurov, A. A. Akulinkin, A. V. Panin, V. P. Sergeev, M. P. Kalashnikov, A. V. Voronov, and Ch. Cheng, Phys. Mesomech. 20 (2), 185 (2017).

    Article  Google Scholar 

  2. A. R. Shugurov and M. S. Kazachenok, Surf. Coat. Technol. 353, 254 (2018).

    Article  Google Scholar 

  3. L. Chen, J. Paulitsch, Y. Du, and P. H. Mayrhofer, Surf. Coat. Technol. 206, 2954 (2012).

    Article  Google Scholar 

  4. P. H. Mayrhofer, R. Rachbauer, D. Holec, F. Rovere, and J. M. Schneider, in Comprehensive Materials Processing (Elsevier, Amsterdam, 2014), p. 355.

    Google Scholar 

  5. I. V. Blinkov, A. O. Volkhonskii, D. S. Belov, V. S. Sergevnin, A. V. Chernogor, T. V. Kiseleva, and A. V. Bon-darev, Tech. Phys. Lett. 44, 167 (2018).

    Article  Google Scholar 

  6. B. Grossmann, A. Jamnig, N. Schalk, C. Czettl, M. Pohler, and C. Mitterer, J. Vac. Sci. Technol. A 35, 060604 (2017).

    Article  Google Scholar 

  7. W. M. Seidl, M. Bartosik, S. Kolozsvari, H. Bolvardi, and P. H. Mayrhofer, Surf. Coat. Technol. 344, 244 (2018).

    Article  Google Scholar 

  8. M. Mikula, M. Truchly, D. G. Sangiovanni, D. Pla-sienka, T. Roch, M. Gregor, P. Durina, M. Janik, and P. Kús, J. Vac. Sci. Technol., A 35, 060602 (2017).

    Article  Google Scholar 

  9. X. Sui, G. Li, C. Jiang, H. Yu, K. Wang, and Q. Wang, Int. J. Refract. Met. Hard. Mater. 58, 152 (2016).

    Article  Google Scholar 

  10. Y. Yang, Y. Xu, L. Chen, and P. H. Mayrhofer, Surf. Coat. Technol. 328, 428 (2017).

    Article  Google Scholar 

  11. T. H. Hsieh, C. H. Hsu, C. Y. Wu, J. Y. Kao, and C. Y. Hsu, Curr. Appl. Phys. 18, 512 (2018).

    Article  ADS  Google Scholar 

  12. E. V. Berlin and L. A. Seidman, Production of Thin Films by Reactive Magnetron Sputtering (Tekhnosfera, Moscow, 2014) [in Russian].

    Google Scholar 

  13. L. Chen, M. Moser, Y. Du, and P. H. Mayrhofer, Thin Solid Films 517, 6635 (2009).

    Article  ADS  Google Scholar 

  14. N. Schalk, J. F. T. S. Fotso, D. Holec, G. Jakopic, A. Fian, V. L. Terziyska, R. Daniel, and C. Mitterer, Acta Mater. 119, 26 (2016).

    Article  Google Scholar 

  15. Y. H. Cheng and B. K. Tay, J. Cryst. Growth 252, 257 (2003).

    Article  ADS  Google Scholar 

  16. J. A. Thornton, Ann. Rev. Mater. Sci. 7, 239 (1977).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute of Strength Physics and Materials Science, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia

    A. R. Shugurov, A. A. Akulinkin, A. M. Kasterov & M. P. Kalashnikov

  2. Tomsk Scientific Center, Siberian Branch, Russian Academy of Sciences, 634055, Tomsk, Russia

    A. A. Akulinkin

Authors
  1. A. R. Shugurov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. A. Akulinkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. M. Kasterov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M. P. Kalashnikov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to A. R. Shugurov.

Additional information

Translated by P. Pozdeev

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Shugurov, A.R., Akulinkin, A.A., Kasterov, A.M. et al. The Influence of Nitrogen Partial Pressure on the Composition, Microstructure, and Mechanical Characteristics of Ti1 –x–yAlxTаyN Coatings Obtained by Reactive Magnetron Sputtering. Tech. Phys. Lett. 45, 418–422 (2019). https://doi.org/10.1134/S1063785019040291

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785019040291

Search

Navigation