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Regular Microstructures Based on Polyethylene Terephthalate Films

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Abstract

A method for forming regular dielectric and metallic microstructures based on polyethylene terephthalate films irradiated with a synchrotron radiation source through a mask with subsequent etching. To study their geometric parameters, scanning electron microscopy was used.

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Authors and Affiliations

  1. Shubnikov Institute of Crystallography, Federal Research Center “Crystallography and Photonics,” Russian Academy of Sciences, 119333, Moscow, Russia

    V. E. Asadchikov, S. A. Bedin, A. B. Vasil’ev & Yu. V. Grigor’ev

  2. Moscow Pedagogical State University, 119991, Moscow, Russia

    S. A. Bedin

  3. Budker Institute of Nuclear Physics, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia

    V. P. Naz’mov

Authors
  1. V. E. Asadchikov
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  2. S. A. Bedin
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  3. A. B. Vasil’ev
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  4. Yu. V. Grigor’ev
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  5. V. P. Naz’mov
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Corresponding author

Correspondence to V. E. Asadchikov.

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Translated by O. Kadkin

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Asadchikov, V.E., Bedin, S.A., Vasil’ev, A.B. et al. Regular Microstructures Based on Polyethylene Terephthalate Films. Tech. Phys. Lett. 45, 232–234 (2019). https://doi.org/10.1134/S1063785019030027

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  • DOI: https://doi.org/10.1134/S1063785019030027

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