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A New Approach to TOF-SIMS Analysis of the Phase Composition of Carbon-Containing Materials

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Abstract

New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C8/C5 and CsC8/CsC4. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia

    M. N. Drozdov, Yu. N. Drozdov, A. I. Okhapkin & S. A. Kraev

  2. Institute of Applied Physics, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia

    M. V. Lobaev

Authors
  1. M. N. Drozdov
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  2. Yu. N. Drozdov
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  3. A. I. Okhapkin
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  4. S. A. Kraev
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  5. M. V. Lobaev
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Correspondence to M. N. Drozdov.

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Translated by P. Pozdeev

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Drozdov, M.N., Drozdov, Y.N., Okhapkin, A.I. et al. A New Approach to TOF-SIMS Analysis of the Phase Composition of Carbon-Containing Materials. Tech. Phys. Lett. 45, 48–52 (2019). https://doi.org/10.1134/S1063785019010231

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  • DOI: https://doi.org/10.1134/S1063785019010231

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