Abstract
A photodetector for the visible and near-IR spectral range has been created on the basis of a chemical- vapor-deposited diamond modulation-doped with boron. The detected electromagnetic radiation is absorbed in a thin Cr (7 nm)–Au (5.5 nm) bimetallic sublayer deposited on the surface of a modulationdoped diamond film comprising a highly doped (up to 5 × 1019 cm–3) 3-nm-thick delta-layer, low-doped (~1017 cm–3) 800-nm-thick sublayer, and highly doped (1020 cm–3) ~10-μm-thick sublayer with an ohmic Ti(50 nm)/Pt(15 nm)/Au(30 nm) contact. Holes generated in the bimetallic sublayer diffuse into diamond and are accelerated by an electric field in the low-doped sublayer to form a response photocurrent. The ampere/watt responsivity of the photodetector reaches 1 μA/W at a radiation wavelength of 445 nm and 0.18 μA/W at 1.06 μm.
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References
A. T. Collins, in CVD Diamond for Electronic Devices and Sensors, Ed. by R. S. Sussmann (Wiley, Chichester, 2009), p.165.
Yu. V. Gulyaev, G. V. Chucheva, A. E. Nabiev, A. A. Altukhov, A. V. Popov, V. S. Feshchenko, and V. A. Shepelev, J. Commun. Technol. Electron. 61, 449 (2016).
E. A. Il’ichev, A. E. Kuleshov, R. M. Nabiev, G. N. Petrukhin, G. S. Rychkov, and E. G. Teverovskaya, Tech. Phys. Lett. 43, 345 (2017).
M. Bruzzi, F. Hartjes, S. Lagomarsino, D. Menichelli, S. Mersi, S. Miglio, M. Scaringella, and S. Sciortino, Phys. Status Solidi A 199, 138 (2003).
S. Majdi, M. Kolahdouz, M. Moeen, K. K. Kovi, R. S. Balmer, H. H. Radamson, and J. Isberg, Appl. Phys. Lett. 105, 163510 (2014).
S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1981), Chap.13.
J. E. Butler, M. W. Geis, K. E. Krohn, J. Lawless, Jr., S. Deneault, T. M. Lyszczarz, D. Flechtner, and R. Wright, Semicond. Sci. Technol. 18, S67 (2003).
A. L. Vikharev, A. M. Gorbachev, M. A. Lobaev, A. B. Muchnikov, D. B. Radishev, V. A. Isaev, V. V. Chernov, S. A. Bogdanov, M. N. Drozdov, and J. E. Butler, Phys. Status Solidi RRL 10, 324 (2016).
V. A. Kukushkin and S. A. Bogdanov, Diamond Rel. Mater. 60, 94 (2015).
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Original Russian Text © V.A. Kukushkin, D.B. Radischev, M.A. Lobaev, S.A. Bogdanov, A.V. Zdoroveischev, I.I. Chunin, 2017, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 43, No. 24, pp. 65–71.
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Kukushkin, V.A., Radischev, D.B., Lobaev, M.A. et al. A CVD Diamond-Based Photodetector for the Visible and Near-IR Spectral Range. Tech. Phys. Lett. 43, 1121–1123 (2017). https://doi.org/10.1134/S1063785017120215
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DOI: https://doi.org/10.1134/S1063785017120215