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An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte)

Abstract

The results of examination of thin-film samples of the LiPON solid electrolyte, which were synthesized by magnetron sputtering, are reported. Data on the morphology, structure, elemental and phase composition, and electrophysical parameters of LiPON films are presented.

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Correspondence to A. S. Rudyi.

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Original Russian Text © A.S. Rudyi, S.V. Vasil’ev, M.E. Lebedev, A.V. Metlitskaya, A.A. Mironenko, V.V. Naumov, A.V. Novozhilova, I.S. Fedorov, A.B. Churilov, 2017, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 43, No. 11, pp. 3–11.

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Rudyi, A.S., Vasil’ev, S.V., Lebedev, M.E. et al. An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte). Tech. Phys. Lett. 43, 503–506 (2017). https://doi.org/10.1134/S106378501706013X

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