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Technical Physics Letters

, Volume 43, Issue 6, pp 503–506 | Cite as

An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte)

  • A. S. RudyiEmail author
  • S. V. Vasil’ev
  • M. E. Lebedev
  • A. V. Metlitskaya
  • A. A. Mironenko
  • V. V. Naumov
  • A. V. Novozhilova
  • I. S. Fedorov
  • A. B. Churilov
Article
  • 40 Downloads

Abstract

The results of examination of thin-film samples of the LiPON solid electrolyte, which were synthesized by magnetron sputtering, are reported. Data on the morphology, structure, elemental and phase composition, and electrophysical parameters of LiPON films are presented.

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Copyright information

© Pleiades Publishing, Ltd. 2017

Authors and Affiliations

  • A. S. Rudyi
    • 1
    • 2
    Email author
  • S. V. Vasil’ev
    • 1
    • 2
  • M. E. Lebedev
    • 2
  • A. V. Metlitskaya
    • 1
    • 2
  • A. A. Mironenko
    • 2
  • V. V. Naumov
    • 2
  • A. V. Novozhilova
    • 1
    • 2
  • I. S. Fedorov
    • 2
  • A. B. Churilov
    • 1
    • 2
  1. 1.Demidov Yaroslavl State UniversityYaroslavlRussia
  2. 2.Institute of Physics and Technology (Yaroslavl Branch)Russian Academy of SciencesYaroslavlRussia

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