An experimental examination of thin films of lithium phosphorus oxynitride (a solid electrolyte)
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The results of examination of thin-film samples of the LiPON solid electrolyte, which were synthesized by magnetron sputtering, are reported. Data on the morphology, structure, elemental and phase composition, and electrophysical parameters of LiPON films are presented.
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- 3.Xiaohua Yu, J. B. Bates, and G. E. Jellison, in Proceedings of the Symposium on Thin Film Solid Ionic Devices and Materials (Electrochem. Soc., Pennignton, NJ, 1996), Vol. 95-22, p. 23.Google Scholar