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A holographic method of the quantitative measurement of photolithographic replicas of thick raised surface defects

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Abstract

To solve the problem of the evaluation of the characteristic sizes and patterns of surface microdefects of complex-shaped samples, a holographic method for the measurement of transparent replicas representing an inverse impression of the investigated surface is proposed. This measurement method is based on the digital registration of the interferograms of a polymeric replica in the modified off-axis Leith–Upatnieks holographic scheme and on the calculation of the phase-incursion difference from a series of reconstructed digital holograms.

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Authors and Affiliations

  1. Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, 603022, Russia

    N. S. Budnikov, V. V. Dudenkova, V. E. Kotomina & O. A. Morozov

  2. Razuvaev Institute of Organometallic Chemistry, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia

    V. V. Semenov

Authors
  1. N. S. Budnikov
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  2. V. V. Dudenkova
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  3. V. E. Kotomina
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  4. O. A. Morozov
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  5. V. V. Semenov
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Corresponding author

Correspondence to V. V. Dudenkova.

Additional information

Original Russian Text © N.S. Budnikov, V.V. Dudenkova, V.E. Kotomina, O.A. Morozov, V.V. Semenov, 2017, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 43, No. 11, pp. 81–87.

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Budnikov, N.S., Dudenkova, V.V., Kotomina, V.E. et al. A holographic method of the quantitative measurement of photolithographic replicas of thick raised surface defects. Tech. Phys. Lett. 43, 539–541 (2017). https://doi.org/10.1134/S1063785017060050

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  • DOI: https://doi.org/10.1134/S1063785017060050

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